Strings, loops and pyramids-building blocks for microstructures

H. H. Busta, A. D. Feinerman, J. B. Ketterson, R. D. Cueller

Research output: Chapter in Book/Report/Conference proceedingChapter


By combining the selective deposition of tungsten on silicon with micromachining techniques, several microelectronic devices have been developed. These include ultrathin tungste2 strings with cross-sections ranging from 300 × 300A2 to 600 × 2000A, tungsten loops, and tungsten cladded pyramids. Initial interest of the strings and loops concentrated in studying quantum mechanical effects such as localization and the Aharonov-Bohm effect at cryogenic temperatures. However, the strings can be made free -standing, thus becoming avai lable for vibration sensing and the loops could be used as bearings. The pyramids could find applications in scanning tunneling microscopes, as surgical scalpels, and as Fowler-Nordheim field emitters in flat panel displays and in high current sources.

Original languageEnglish (US)
Title of host publicationMicromechanics and MEMS
Subtitle of host publicationClassic and Seminal Papers to 1990
PublisherWiley-IEEE Press
Number of pages5
ISBN (Electronic)9780470545263
ISBN (Print)0780310853, 9780780310858
StatePublished - Jan 1 1997

ASJC Scopus subject areas

  • General Computer Science
  • General Engineering
  • General Physics and Astronomy
  • General Energy


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