Abstract
InAsx.P1-x/InP strained-layer heterostructures with a wide range of compositionxwere prepared using atmospheric-pressure organometallic vapor phase epitaxy. Composition of the InAsxP1-x layers was found to depend on both the TMIn partial pressure and the state of strain of the layer. Strained-layer superlattices exhibited smooth surface morphologies and abrupt interfaces, as determined by x-ray diffraction and high-resolution electron microscopy. InAsxP1-x compositions as high asx= 0.8 were obtained, corresponding to strain between the layers of 2.6%. Strained quantum well structures with InAsxP1-x compositions as high asx= 0.67 were also grown and their structural properties were evaluated using photoluminescence (PL) spectroscopy. PL spectra indicated atomically smooth interfaces for structures with strains as high as 2.1%.
Original language | English (US) |
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Pages (from-to) | 3490-3494 |
Number of pages | 5 |
Journal | Journal of the Electrochemical Society |
Volume | 136 |
Issue number | 11 |
DOIs | |
State | Published - Nov 1989 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Materials Chemistry
- Surfaces, Coatings and Films
- Electrochemistry
- Renewable Energy, Sustainability and the Environment