Abstract
Crystalline CN/ZrN superlattice coatings have been synthesized using a dual-cathode unbalanced magnetron sputtering system. We observed a strong correlation between coating hardness and the occurrence of strong (111) texture for the ZrN component, supporting the hypothesis of pseudomorphic stabilization. At a ZrN-to-CN thickness ratio of three, we obtained a nanoindentation hardness of about 43 GPa. Electron microscopy studies showed that these CN/ZrN superlattice coatings are fully crystalline and dense at small superlattice periods. We observed three extra electron diffraction features that are consistent with the existence of β-C3N4. Electron energy-loss spectroscopy revealed that the carbon atoms are in the sp3 state. The combination of all data provides strong evidence for the existence of β-C3N4 in these superlattice coatings.
Original language | English (US) |
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Title of host publication | Hard Coatings Based on Borides, Carbides |
Publisher | Minerals, Metals & Materials Soc (TMS) |
Pages | 17-24 |
Number of pages | 8 |
State | Published - Jan 1 1998 |
Event | Proceedings of the 1998 TMS Annual Meeting - San Antonio, TX, USA Duration: Feb 15 1998 → Feb 19 1998 |
Other
Other | Proceedings of the 1998 TMS Annual Meeting |
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City | San Antonio, TX, USA |
Period | 2/15/98 → 2/19/98 |
ASJC Scopus subject areas
- Geology
- Metals and Alloys