Structural characterization of CN/ZrN superlattice coatings

Mei Ling Wu*, Xi Wei Lin, Vinayak P Dravid, Yip-Wah Chung

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Crystalline CN/ZrN superlattice coatings have been synthesized using a dual-cathode unbalanced magnetron sputtering system. We observed a strong correlation between coating hardness and the occurrence of strong (111) texture for the ZrN component, supporting the hypothesis of pseudomorphic stabilization. At a ZrN-to-CN thickness ratio of three, we obtained a nanoindentation hardness of about 43 GPa. Electron microscopy studies showed that these CN/ZrN superlattice coatings are fully crystalline and dense at small superlattice periods. We observed three extra electron diffraction features that are consistent with the existence of β-C3N4. Electron energy-loss spectroscopy revealed that the carbon atoms are in the sp3 state. The combination of all data provides strong evidence for the existence of β-C3N4 in these superlattice coatings.

Original languageEnglish (US)
Title of host publicationHard Coatings Based on Borides, Carbides
PublisherMinerals, Metals & Materials Soc (TMS)
Number of pages8
StatePublished - Jan 1 1998
EventProceedings of the 1998 TMS Annual Meeting - San Antonio, TX, USA
Duration: Feb 15 1998Feb 19 1998


OtherProceedings of the 1998 TMS Annual Meeting
CitySan Antonio, TX, USA

ASJC Scopus subject areas

  • Geology
  • Metals and Alloys


Dive into the research topics of 'Structural characterization of CN/ZrN superlattice coatings'. Together they form a unique fingerprint.

Cite this