TY - GEN
T1 - Structure and properties of a-C:N films prepared by pulsed excimer laser deposition
AU - Xiong, Fulin
AU - Chang, R. P.H.
AU - White, C. W.
PY - 1993/1/1
Y1 - 1993/1/1
N2 - We present results on the synthesis of a-C:N films deposited by pulsed excimer laser ablation of graphite in a nitrogen gas ambient. Analysis with RBS and forward recoil spectrometry show that the films are hydrogen-free and nitrogen can be incorporated up to 40% by varying the nitrogen gas pressure. Electron microscopy has identified these films to be amorphous. Raman spectroscopy, infrared spectroscopy, and electron energy loss spectroscopy have revealed carbon-nitrogen bonding structures. Compared to a-diamond films prepared by the same technique, the C:N films still possess the properties of high mechanical hardness, chemically inertness and good wear resistance, but incorporation of nitrogen into the films generally degrades their diamond-like properties. The results suggest that nitrogen doping effect is resulted in the films under the present process, instead of carbon-nitrogen compound formation.
AB - We present results on the synthesis of a-C:N films deposited by pulsed excimer laser ablation of graphite in a nitrogen gas ambient. Analysis with RBS and forward recoil spectrometry show that the films are hydrogen-free and nitrogen can be incorporated up to 40% by varying the nitrogen gas pressure. Electron microscopy has identified these films to be amorphous. Raman spectroscopy, infrared spectroscopy, and electron energy loss spectroscopy have revealed carbon-nitrogen bonding structures. Compared to a-diamond films prepared by the same technique, the C:N films still possess the properties of high mechanical hardness, chemically inertness and good wear resistance, but incorporation of nitrogen into the films generally degrades their diamond-like properties. The results suggest that nitrogen doping effect is resulted in the films under the present process, instead of carbon-nitrogen compound formation.
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M3 - Conference contribution
AN - SCOPUS:0027150827
SN - 1558991808
T3 - Materials Research Society Symposium Proceedings
SP - 587
EP - 592
BT - Materials Research Society Symposium Proceedings
PB - Publ by Materials Research Society
T2 - Laser Ablation in Materials Processing: Fundamentals and Applications
Y2 - 1 December 1992 through 4 December 1992
ER -