Structure, stability, and mechanical properties of epitaxial W/NbN superlattices

A. Madan*, S. A. Barnett, A. Misra, H. Kung, M. Nastasi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

35 Scopus citations


Epitaxial growth was measured in W/NbN superlattices grown on MgO (001) substrates for modulation wavelengths ranging from 1.3 to 25 nm by dc reactive magnetron sputtering experiments. X ray diffraction and Rutherford backscattering revealed well defined planar structure for the superlattices with interface widths nearing 0.2 nm. The superlattice hardnesses was 33 GPa, higher than the individual hardnesses of either W or NbN. The superlattice hardness remained uneffected after vacuum annealing.

Original languageEnglish (US)
Pages (from-to)952-957
Number of pages6
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Issue number3
StatePublished - May 2001

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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