Abstract
Epitaxial growth was measured in W/NbN superlattices grown on MgO (001) substrates for modulation wavelengths ranging from 1.3 to 25 nm by dc reactive magnetron sputtering experiments. X ray diffraction and Rutherford backscattering revealed well defined planar structure for the superlattices with interface widths nearing 0.2 nm. The superlattice hardnesses was 33 GPa, higher than the individual hardnesses of either W or NbN. The superlattice hardness remained uneffected after vacuum annealing.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 952-957 |
| Number of pages | 6 |
| Journal | Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films |
| Volume | 19 |
| Issue number | 3 |
| DOIs | |
| State | Published - May 1 2001 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
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Madan, A., Barnett, S. A., Misra, A., Kung, H., & Nastasi, M. (2001). Structure, stability, and mechanical properties of epitaxial W/NbN superlattices. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, 19(3), 952-957. https://doi.org/10.1116/1.1365133