Structure, stability, and mechanical properties of epitaxial W/NbN superlattices

A. Madan; S. A. Barnett; A. Misra; H. Kung; M. Nastasi

doi:10.1116/1.1365133

Structure, stability, and mechanical properties of epitaxial W/NbN superlattices

A. Madan^*, S. A. Barnett, A. Misra, H. Kung, M. Nastasi

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

Epitaxial growth was measured in W/NbN superlattices grown on MgO (001) substrates for modulation wavelengths ranging from 1.3 to 25 nm by dc reactive magnetron sputtering experiments. X ray diffraction and Rutherford backscattering revealed well defined planar structure for the superlattices with interface widths nearing 0.2 nm. The superlattice hardnesses was 33 GPa, higher than the individual hardnesses of either W or NbN. The superlattice hardness remained uneffected after vacuum annealing.

Original language	English (US)
Pages (from-to)	952-957
Number of pages	6
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	19
Issue number	3
DOIs	https://doi.org/10.1116/1.1365133
State	Published - May 2001

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1116/1.1365133

Cite this

@article{d0cc7694a8e4405188f4e9674a088668,

title = "Structure, stability, and mechanical properties of epitaxial W/NbN superlattices",

abstract = "Epitaxial growth was measured in W/NbN superlattices grown on MgO (001) substrates for modulation wavelengths ranging from 1.3 to 25 nm by dc reactive magnetron sputtering experiments. X ray diffraction and Rutherford backscattering revealed well defined planar structure for the superlattices with interface widths nearing 0.2 nm. The superlattice hardnesses was 33 GPa, higher than the individual hardnesses of either W or NbN. The superlattice hardness remained uneffected after vacuum annealing.",

author = "A. Madan and Barnett, {S. A.} and A. Misra and H. Kung and M. Nastasi",

year = "2001",

month = may,

doi = "10.1116/1.1365133",

language = "English (US)",

volume = "19",

pages = "952--957",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "3",

}

TY - JOUR

T1 - Structure, stability, and mechanical properties of epitaxial W/NbN superlattices

AU - Madan, A.

AU - Barnett, S. A.

AU - Misra, A.

AU - Kung, H.

AU - Nastasi, M.

PY - 2001/5

Y1 - 2001/5

N2 - Epitaxial growth was measured in W/NbN superlattices grown on MgO (001) substrates for modulation wavelengths ranging from 1.3 to 25 nm by dc reactive magnetron sputtering experiments. X ray diffraction and Rutherford backscattering revealed well defined planar structure for the superlattices with interface widths nearing 0.2 nm. The superlattice hardnesses was 33 GPa, higher than the individual hardnesses of either W or NbN. The superlattice hardness remained uneffected after vacuum annealing.

AB - Epitaxial growth was measured in W/NbN superlattices grown on MgO (001) substrates for modulation wavelengths ranging from 1.3 to 25 nm by dc reactive magnetron sputtering experiments. X ray diffraction and Rutherford backscattering revealed well defined planar structure for the superlattices with interface widths nearing 0.2 nm. The superlattice hardnesses was 33 GPa, higher than the individual hardnesses of either W or NbN. The superlattice hardness remained uneffected after vacuum annealing.

UR - http://www.scopus.com/inward/record.url?scp=0035335486&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035335486&partnerID=8YFLogxK

U2 - 10.1116/1.1365133

DO - 10.1116/1.1365133

M3 - Article

AN - SCOPUS:0035335486

VL - 19

SP - 952

EP - 957

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 0734-2101

IS - 3

ER -

Structure, stability, and mechanical properties of epitaxial W/NbN superlattices

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this