Abstract
AlN/VN superlattices with different periods were studied using x-ray diffraction and transmission electron microscopy (TEM). A phase transformation of the AlN from an epitaxially stabilized rock-salt structure to a hexagonal wurtzite structure was observed for an AlN layer thickness greater than 4 nm. A structural model is proposed on the basis of TEM results for the orientation of the transformed phase. The VN layer grown on top of the hexagonal AlN was observed to be reoriented compared to that in the stabilized B1-AlN/VN. The VN nucleated by taking the w-AlN(002) plane as its (111) plane instead of the (002) plane.
Original language | English (US) |
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Pages (from-to) | 1224-1231 |
Number of pages | 8 |
Journal | Journal of Materials Research |
Volume | 17 |
Issue number | 5 |
DOIs | |
State | Published - May 2002 |
Funding
This work was supported by the MRSEC program of the National Science Foundation (DMR-9632472) at the Materials Research Center of Northwestern University.
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering