Studies of metallic species and oxygen incorporation during sputter-deposition of SrBi2Ta2O9 films, using mass spectroscopy of recoiled ions

J. Im; A. R. Krauss; A. M. Dhote; D. M. Gruen; O. Auciello; R. Ramesh; R. P.H. Chang

doi:10.1063/1.121409

Studies of metallic species and oxygen incorporation during sputter-deposition of SrBi₂Ta₂O₉ films, using mass spectroscopy of recoiled ions

J. Im^*, A. R. Krauss, A. M. Dhote, D. M. Gruen, O. Auciello, R. Ramesh, R. P.H. Chang

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

We have recently developed a mass spectroscopy of recoiled ions technique which is suitable for monolayer-specific surface analysis of thin films during growth. We present initial results using this technique to study the effect of different bottom electrode layers on metallic species and oxygen incorporation in the early stages of SrBi₂Ta₂O₃ (SBT) film growth via ion beam-sputter deposition. The work discussed here has been focused on studying the incorporation of Sr, Bi, and Ta during growth of SBT on Pt/Ti/SiO₂/Si, Pt/MgO, Ti, and Si substrates. We found that the incorporation of Bi in sputter-deposited SBT films depends critically on the bottom electrode surface composition and the growth temperature.

Original language	English (US)
Pages (from-to)	2529-2531
Number of pages	3
Journal	Applied Physics Letters
Volume	72
Issue number	20
DOIs	https://doi.org/10.1063/1.121409
State	Published - 1998

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Studies of metallic species and oxygen incorporation during sputter-deposition of SrBi2Ta2O9 films, using mass spectroscopy of recoiled ions",

abstract = "We have recently developed a mass spectroscopy of recoiled ions technique which is suitable for monolayer-specific surface analysis of thin films during growth. We present initial results using this technique to study the effect of different bottom electrode layers on metallic species and oxygen incorporation in the early stages of SrBi2Ta2O3 (SBT) film growth via ion beam-sputter deposition. The work discussed here has been focused on studying the incorporation of Sr, Bi, and Ta during growth of SBT on Pt/Ti/SiO2/Si, Pt/MgO, Ti, and Si substrates. We found that the incorporation of Bi in sputter-deposited SBT films depends critically on the bottom electrode surface composition and the growth temperature.",

author = "J. Im and Krauss, {A. R.} and Dhote, {A. M.} and Gruen, {D. M.} and O. Auciello and R. Ramesh and Chang, {R. P.H.}",

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volume = "72",

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T1 - Studies of metallic species and oxygen incorporation during sputter-deposition of SrBi2Ta2O9 films, using mass spectroscopy of recoiled ions

AU - Im, J.

AU - Krauss, A. R.

AU - Dhote, A. M.

AU - Gruen, D. M.

AU - Auciello, O.

AU - Ramesh, R.

AU - Chang, R. P.H.

PY - 1998

Y1 - 1998

N2 - We have recently developed a mass spectroscopy of recoiled ions technique which is suitable for monolayer-specific surface analysis of thin films during growth. We present initial results using this technique to study the effect of different bottom electrode layers on metallic species and oxygen incorporation in the early stages of SrBi2Ta2O3 (SBT) film growth via ion beam-sputter deposition. The work discussed here has been focused on studying the incorporation of Sr, Bi, and Ta during growth of SBT on Pt/Ti/SiO2/Si, Pt/MgO, Ti, and Si substrates. We found that the incorporation of Bi in sputter-deposited SBT films depends critically on the bottom electrode surface composition and the growth temperature.

AB - We have recently developed a mass spectroscopy of recoiled ions technique which is suitable for monolayer-specific surface analysis of thin films during growth. We present initial results using this technique to study the effect of different bottom electrode layers on metallic species and oxygen incorporation in the early stages of SrBi2Ta2O3 (SBT) film growth via ion beam-sputter deposition. The work discussed here has been focused on studying the incorporation of Sr, Bi, and Ta during growth of SBT on Pt/Ti/SiO2/Si, Pt/MgO, Ti, and Si substrates. We found that the incorporation of Bi in sputter-deposited SBT films depends critically on the bottom electrode surface composition and the growth temperature.

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Studies of metallic species and oxygen incorporation during sputter-deposition of SrBi₂Ta₂O₉ films, using mass spectroscopy of recoiled ions

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