ETUDE DES DEFAUTS DANS LES COUCHES HETEROEPITAXIALES DE MATERIAUX III-V PAR L'ANALYSE METALLOGRAPHIQUE SUR BISEAU CHIMIQUE.

Translated title of the contribution: Study of Defects in the Heteroepitaxial Layers of III-V Materials by Metallographic Analysis on a Chemical Bevel.

A. M. Huber*, G. Laurencin, M. Razeghi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

The 'etch pit' observation technique has been developed for the study of the crystalline perfection of mono and multilayer heterostructure. Before the selective revelation the authors formed a chemical bevel with a very low angle. By this technique, the presence of misfit dislocation at the interface may be determined.

Translated title of the contributionStudy of Defects in the Heteroepitaxial Layers of III-V Materials by Metallographic Analysis on a Chemical Bevel.
Original languageFrench
Title of host publicationJournal de Physique (Paris), Colloque
Pages409-414
Number of pages6
Edition9
StatePublished - Sep 1 1983

Publication series

NameJournal de Physique (Paris), Colloque
Number9
Volume44
ISSN (Print)0449-1947

ASJC Scopus subject areas

  • Engineering(all)

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