Abstract
The angular spectrum of radially polarized Laguerre-Gaussian beams was tailored by an annular aperture in a semiconductor solid immersion lens microscope. The radii of two concentric rings in the amplitude aperture were optimized by a multi-objective particle swarm optimization algorithm. A GaAs solid immersion lens with NA=3.4 was used in the numerical calculation and a spot size of 98 nm (<λ/10) at a wavelength of 1064 nm illumination was obtained.
Original language | English (US) |
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Pages (from-to) | 108-111 |
Number of pages | 4 |
Journal | Optics Communications |
Volume | 315 |
DOIs | |
State | Published - 2014 |
Funding
The work presented in this paper was supported by the Intelligence Advanced Research Projects Activity (IARPA) via Air Force Research Laboratory (AFRL) Contract no. FA8650-11-C-71102 .
Keywords
- Apodization
- High-resolution imaging
- Optical microscopy
- Particle swarm optimization
- Solid immersion lens
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Physical and Theoretical Chemistry
- Electrical and Electronic Engineering