Sub-λ/10 spot size in semiconductor solid immersion lens microscopy

Mohamadreza G. Banaee; M. Selim Ünlü; Bennett B. Goldberg

doi:10.1016/j.optcom.2013.11.005

Sub-λ/10 spot size in semiconductor solid immersion lens microscopy

Mohamadreza G. Banaee^*, M. Selim Ünlü, Bennett B. Goldberg

^*Corresponding author for this work

Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

The angular spectrum of radially polarized Laguerre-Gaussian beams was tailored by an annular aperture in a semiconductor solid immersion lens microscope. The radii of two concentric rings in the amplitude aperture were optimized by a multi-objective particle swarm optimization algorithm. A GaAs solid immersion lens with NA=3.4 was used in the numerical calculation and a spot size of 98 nm (<λ/10) at a wavelength of 1064 nm illumination was obtained.

Original language	English (US)
Pages (from-to)	108-111
Number of pages	4
Journal	Optics Communications
Volume	315
DOIs	https://doi.org/10.1016/j.optcom.2013.11.005
State	Published - Jan 1 2014

Keywords

Apodization
High-resolution imaging
Optical microscopy
Particle swarm optimization
Solid immersion lens

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Physical and Theoretical Chemistry
Electrical and Electronic Engineering

Access to Document

10.1016/j.optcom.2013.11.005

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abstract = "The angular spectrum of radially polarized Laguerre-Gaussian beams was tailored by an annular aperture in a semiconductor solid immersion lens microscope. The radii of two concentric rings in the amplitude aperture were optimized by a multi-objective particle swarm optimization algorithm. A GaAs solid immersion lens with NA=3.4 was used in the numerical calculation and a spot size of 98 nm (<λ/10) at a wavelength of 1064 nm illumination was obtained.",

keywords = "Apodization, High-resolution imaging, Optical microscopy, Particle swarm optimization, Solid immersion lens",

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AU - Selim Ünlü, M.

AU - Goldberg, Bennett B.

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