Sub-100 nm periodic nanodot arrays using plasmonic lithography

W. Srituravanich, N. Fang, Cheng Sun, X. Zhang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings of 48th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication
State	Published - 2004
Event	International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication - San Diego, California Duration: Jan 1 2004 → …

Conference	International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication
Period	1/1/04 → …

Cite this

@inproceedings{9a1c24c1f4104e05b962d87d43dcc028,

title = "Sub-100 nm periodic nanodot arrays using plasmonic lithography",

author = "W. Srituravanich and N. Fang and Cheng Sun and X. Zhang",

year = "2004",

language = "English",

booktitle = "Proceedings of 48th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication",

note = "International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication ; Conference date: 01-01-2004",

}

TY - GEN

T1 - Sub-100 nm periodic nanodot arrays using plasmonic lithography

AU - Srituravanich, W.

AU - Fang, N.

AU - Sun, Cheng

AU - Zhang, X.

PY - 2004

Y1 - 2004

M3 - Conference contribution

BT - Proceedings of 48th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication

T2 - International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication

Y2 - 1 January 2004

ER -