Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens

F. Hakan Köklü; A. N. Vamivakas; J. I. Quesnel; S. B. Ippolito; B. B. Goldberg; M. S. Ünlü

doi:10.1109/LEOS.2007.4382516

Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens

F. Hakan Köklü, A. N. Vamivakas, J. I. Quesnel, S. B. Ippolito, B. B. Goldberg, M. S. Ünlü

Physics and Astronomy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We report a lateral spatial resolution of 0.37μm with a custom infrared widefield microscope while imaging subsurface features in silicon integrated circuits from backside. In addition, 2.65μm apart polysilicon and metal layers can be differentiated.

Original language	English (US)
Title of host publication	LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings
Pages	535-536
Number of pages	2
DOIs	https://doi.org/10.1109/LEOS.2007.4382516
State	Published - Dec 1 2007
Event	20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS - Lake Buena Vista, FL, United States Duration: Oct 21 2007 → Oct 25 2007

Publication series

Name	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
ISSN (Print)	1092-8081

Other

Other	20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS
Country/Territory	United States
City	Lake Buena Vista, FL
Period	10/21/07 → 10/25/07

ASJC Scopus subject areas

Industrial and Manufacturing Engineering
Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/LEOS.2007.4382516

Cite this

Köklü, F. H., Vamivakas, A. N., Quesnel, J. I., Ippolito, S. B., Goldberg, B. B., & Ünlü, M. S. (2007). Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens. In LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings (pp. 535-536). [4382516] (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS). https://doi.org/10.1109/LEOS.2007.4382516

Köklü, F. Hakan ; Vamivakas, A. N. ; Quesnel, J. I. et al. / Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens. LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings. 2007. pp. 535-536 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS).

@inproceedings{4a7a471cc593455ca9d9bd8f981287d2,

title = "Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens",

abstract = "We report a lateral spatial resolution of 0.37μm with a custom infrared widefield microscope while imaging subsurface features in silicon integrated circuits from backside. In addition, 2.65μm apart polysilicon and metal layers can be differentiated.",

author = "K{\"o}kl{\"u}, {F. Hakan} and Vamivakas, {A. N.} and Quesnel, {J. I.} and Ippolito, {S. B.} and Goldberg, {B. B.} and {\"U}nl{\"u}, {M. S.}",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/LEOS.2007.4382516",

language = "English (US)",

isbn = "142440925X",

series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

pages = "535--536",

booktitle = "LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings",

note = "20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS ; Conference date: 21-10-2007 Through 25-10-2007",

}

Köklü, FH, Vamivakas, AN, Quesnel, JI, Ippolito, SB, Goldberg, BB & Ünlü, MS 2007, Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens. in LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings., 4382516, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, pp. 535-536, 20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS, Lake Buena Vista, FL, United States, 10/21/07. https://doi.org/10.1109/LEOS.2007.4382516

Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens. / Köklü, F. Hakan; Vamivakas, A. N.; Quesnel, J. I. et al.

LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings. 2007. p. 535-536 4382516 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens

AU - Köklü, F. Hakan

AU - Vamivakas, A. N.

AU - Quesnel, J. I.

AU - Ippolito, S. B.

AU - Goldberg, B. B.

AU - Ünlü, M. S.

PY - 2007/12/1

Y1 - 2007/12/1

N2 - We report a lateral spatial resolution of 0.37μm with a custom infrared widefield microscope while imaging subsurface features in silicon integrated circuits from backside. In addition, 2.65μm apart polysilicon and metal layers can be differentiated.

AB - We report a lateral spatial resolution of 0.37μm with a custom infrared widefield microscope while imaging subsurface features in silicon integrated circuits from backside. In addition, 2.65μm apart polysilicon and metal layers can be differentiated.

UR - http://www.scopus.com/inward/record.url?scp=51249093448&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=51249093448&partnerID=8YFLogxK

U2 - 10.1109/LEOS.2007.4382516

DO - 10.1109/LEOS.2007.4382516

M3 - Conference contribution

AN - SCOPUS:51249093448

SN - 142440925X

SN - 9781424409259

T3 - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

SP - 535

EP - 536

BT - LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings

T2 - 20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS

Y2 - 21 October 2007 through 25 October 2007

ER -

Köklü FH, Vamivakas AN, Quesnel JI, Ippolito SB, Goldberg BB, Ünlü MS. Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens. In LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings. 2007. p. 535-536. 4382516. (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS). doi: 10.1109/LEOS.2007.4382516

Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens

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