Subsurface imaging of integrated circuits with widefield and confocal microscopy using numerical aperture increasing lens

F. Hakan Köklü, A. N. Vamivakas, J. I. Quesnel, S. B. Ippolito, B. B. Goldberg, M. S. Ünlü

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

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Engineering & Materials Science