Subsurface microscopy of integrated circuits with angular spectrum and polarization control

F. H. Köklü, S. B. Ippolito, B. B. Goldberg, M. S. Ünlü

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm (λ0/9) in the direction perpendicular to the polarization direction.

Original languageEnglish (US)
Pages (from-to)1261-1263
Number of pages3
JournalOptics Letters
Volume34
Issue number8
DOIs
StatePublished - Apr 15 2009

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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