Subsurface microscopy of integrated circuits with angular spectrum and polarization control

F. H. Köklü; S. B. Ippolito; B. B. Goldberg; M. S. Ünlü

doi:10.1364/OL.34.001261

Subsurface microscopy of integrated circuits with angular spectrum and polarization control

F. H. Köklü, S. B. Ippolito, B. B. Goldberg, M. S. Ünlü

Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm (λ₀/9) in the direction perpendicular to the polarization direction.

Original language	English (US)
Pages (from-to)	1261-1263
Number of pages	3
Journal	Optics Letters
Volume	34
Issue number	8
DOIs	https://doi.org/10.1364/OL.34.001261
State	Published - Apr 15 2009

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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title = "Subsurface microscopy of integrated circuits with angular spectrum and polarization control",

abstract = "We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm (λ0/9) in the direction perpendicular to the polarization direction.",

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AU - Ünlü, M. S.

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