Subsurface microscopy of integrated circuits with apodization and polarization control

F. Hakan Köklü; S. B. Ippolito; J. I. Quesnel; B. B. Goldberg; M. S. Ünlü

doi:10.1109/LEOS.2008.4688631

Subsurface microscopy of integrated circuits with apodization and polarization control

F. Hakan Köklü^*, S. B. Ippolito, J. I. Quesnel, B. B. Goldberg, M. S. Ünlü

^*Corresponding author for this work

Physics and Astronomy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We demonstrate a lateral spatial resolution of 160nm (λ₀/ 8) using apodization in subsurface backside microscopy of silicon integrated circuits - a record resolution for one-photon excitation schemes.

Original language	English (US)
Title of host publication	21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008
Pages	344-345
Number of pages	2
DOIs	https://doi.org/10.1109/LEOS.2008.4688631
State	Published - 2008
Event	21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008 - Newport Beach, CA, United States Duration: Nov 9 2008 → Nov 13 2008

Publication series

Name	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
ISSN (Print)	1092-8081

Other

Other	21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008
Country/Territory	United States
City	Newport Beach, CA
Period	11/9/08 → 11/13/08

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/LEOS.2008.4688631

Cite this

Hakan Köklü, F., Ippolito, S. B., Quesnel, J. I., Goldberg, B. B., & Ünlü, M. S. (2008). Subsurface microscopy of integrated circuits with apodization and polarization control. In 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008 (pp. 344-345). [4688631] (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS). https://doi.org/10.1109/LEOS.2008.4688631

@inproceedings{f693aec82f81491e9d3112088630b2f4,

title = "Subsurface microscopy of integrated circuits with apodization and polarization control",

abstract = "We demonstrate a lateral spatial resolution of 160nm (λ0/ 8) using apodization in subsurface backside microscopy of silicon integrated circuits - a record resolution for one-photon excitation schemes.",

author = "{Hakan K{\"o}kl{\"u}}, F. and Ippolito, {S. B.} and Quesnel, {J. I.} and Goldberg, {B. B.} and {\"U}nl{\"u}, {M. S.}",

year = "2008",

doi = "10.1109/LEOS.2008.4688631",

language = "English (US)",

isbn = "9781424419326",

series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

pages = "344--345",

booktitle = "21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008",

note = "21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008 ; Conference date: 09-11-2008 Through 13-11-2008",

}

Hakan Köklü, F, Ippolito, SB, Quesnel, JI, Goldberg, BB & Ünlü, MS 2008, Subsurface microscopy of integrated circuits with apodization and polarization control. in 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008., 4688631, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, pp. 344-345, 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008, Newport Beach, CA, United States, 11/9/08. https://doi.org/10.1109/LEOS.2008.4688631

Subsurface microscopy of integrated circuits with apodization and polarization control. / Hakan Köklü, F.; Ippolito, S. B.; Quesnel, J. I. et al.
21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008. 2008. p. 344-345 4688631 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Subsurface microscopy of integrated circuits with apodization and polarization control

AU - Hakan Köklü, F.

AU - Ippolito, S. B.

AU - Quesnel, J. I.

AU - Goldberg, B. B.

AU - Ünlü, M. S.

PY - 2008

Y1 - 2008

N2 - We demonstrate a lateral spatial resolution of 160nm (λ0/ 8) using apodization in subsurface backside microscopy of silicon integrated circuits - a record resolution for one-photon excitation schemes.

AB - We demonstrate a lateral spatial resolution of 160nm (λ0/ 8) using apodization in subsurface backside microscopy of silicon integrated circuits - a record resolution for one-photon excitation schemes.

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DO - 10.1109/LEOS.2008.4688631

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SN - 9781424419326

T3 - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

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EP - 345

BT - 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008

T2 - 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008

Y2 - 9 November 2008 through 13 November 2008

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Hakan Köklü F, Ippolito SB, Quesnel JI, Goldberg BB, Ünlü MS. Subsurface microscopy of integrated circuits with apodization and polarization control. In 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008. 2008. p. 344-345. 4688631. (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS). doi: 10.1109/LEOS.2008.4688631

Subsurface microscopy of integrated circuits with apodization and polarization control

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