Subsurface microscopy of integrated circuits with apodization and polarization control

F. Hakan Köklü*, S. B. Ippolito, J. I. Quesnel, B. B. Goldberg, M. S. Ünlü

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We demonstrate a lateral spatial resolution of 160nm (λ0/ 8) using apodization in subsurface backside microscopy of silicon integrated circuits - a record resolution for one-photon excitation schemes.

Original languageEnglish (US)
Title of host publication21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008
Pages344-345
Number of pages2
DOIs
StatePublished - Dec 1 2008
Event21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008 - Newport Beach, CA, United States
Duration: Nov 9 2008Nov 13 2008

Publication series

NameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
ISSN (Print)1092-8081

Other

Other21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2008
CountryUnited States
CityNewport Beach, CA
Period11/9/0811/13/08

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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