Subwavelength nanolithography using surface plasmons

W. Srituravanich, N. Fang, Cheng Sun, Q. Luo, X. Zhang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Subwavelength nanolithography using surface plasmons
State	Published - Aug 2003
Event	Third Institute of Electrical and Electronics Engineers (IEEE) Conference on Nanotechnology - Duration: Aug 1 2003 → …

Conference	Third Institute of Electrical and Electronics Engineers (IEEE) Conference on Nanotechnology
Period	8/1/03 → …

Cite this

@inproceedings{e7f91c8c27f64130be612a37d1c2dcf3,

title = "Subwavelength nanolithography using surface plasmons",

author = "W. Srituravanich and N. Fang and Cheng Sun and Q. Luo and X. Zhang",

year = "2003",

month = aug,

language = "English",

booktitle = "Subwavelength nanolithography using surface plasmons",

note = "Third Institute of Electrical and Electronics Engineers (IEEE) Conference on Nanotechnology ; Conference date: 01-08-2003",

}

TY - GEN

T1 - Subwavelength nanolithography using surface plasmons

AU - Srituravanich, W.

AU - Fang, N.

AU - Sun, Cheng

AU - Luo, Q.

AU - Zhang, X.

PY - 2003/8

Y1 - 2003/8

M3 - Conference contribution

BT - Subwavelength nanolithography using surface plasmons

T2 - Third Institute of Electrical and Electronics Engineers (IEEE) Conference on Nanotechnology

Y2 - 1 August 2003

ER -