Summary Abstract: Model Calculations for Thermal and Accelerated Beam Doping in Semiconductor Films Grown by Molecular Beam Epitaxy

S. A. Barnett, A. Rockett, G. Bajor, J. E. Greene

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)406-407
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number2
StatePublished - Apr 1984

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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