@article{12ae7bd9bc5b479baf0eef68b05b3c0f,
title = "Summary Abstract: The role of low-energy ion bombardment during the growth of epitaxial TiN(100) films by reactive magnetron sputtering: Defect formation and annihilation",
author = "L. Hultman and U. Helmersson and Barnett, {S. A.}",
year = "1987",
month = jul,
day = "1",
doi = "10.1116/1.574946",
language = "English (US)",
volume = "5",
pages = "2162--2164",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",
}