@article{e0ccf5f878194c6faab4cf8116a5df3d,
title = "Summary Abstract: Thermal and accelerated (<200 eV) In doping of Si(100) layers during molecular beam epitaxy",
author = "A. Rockett and Hassan, {M. A.} and Barnett, {S. A.} and Greene, {J. E.}",
year = "1986",
month = may,
doi = "10.1116/1.574002",
language = "English (US)",
volume = "4",
pages = "900--901",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "3",
}