Super hardening and deformability in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentations

B. M. Ennis; A. Madan; W. S. Slaughter; S. A. Barnett; S. X. Mao

doi:10.1063/1.1621083

Super hardening and deformability in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentations

B. M. Ennis, A. Madan, W. S. Slaughter, S. A. Barnett, S. X. Mao^*

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

The deformability and superhardening in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentation, were discussed. To investigate the individual interface effect, shallow nanoindentations were made to a depth equal to the individual layer thickness of the epitaxially grown W/NbN nanolayers. It was shown that the increase in hardness is related to the nature of the interface between the layers in the superlattice materials.

Original language	English (US)
Pages (from-to)	6892-6898
Number of pages	7
Journal	Journal of Applied Physics
Volume	94
Issue number	10
DOIs	https://doi.org/10.1063/1.1621083
State	Published - Nov 15 2003

ASJC Scopus subject areas

General Physics and Astronomy

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title = "Super hardening and deformability in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentations",

abstract = "The deformability and superhardening in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentation, were discussed. To investigate the individual interface effect, shallow nanoindentations were made to a depth equal to the individual layer thickness of the epitaxially grown W/NbN nanolayers. It was shown that the increase in hardness is related to the nature of the interface between the layers in the superlattice materials.",

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T1 - Super hardening and deformability in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentations

AU - Ennis, B. M.

AU - Madan, A.

AU - Slaughter, W. S.

AU - Barnett, S. A.

AU - Mao, S. X.

PY - 2003/11/15

Y1 - 2003/11/15

N2 - The deformability and superhardening in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentation, were discussed. To investigate the individual interface effect, shallow nanoindentations were made to a depth equal to the individual layer thickness of the epitaxially grown W/NbN nanolayers. It was shown that the increase in hardness is related to the nature of the interface between the layers in the superlattice materials.

AB - The deformability and superhardening in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentation, were discussed. To investigate the individual interface effect, shallow nanoindentations were made to a depth equal to the individual layer thickness of the epitaxially grown W/NbN nanolayers. It was shown that the increase in hardness is related to the nature of the interface between the layers in the superlattice materials.

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JF - Journal of Applied Physics

IS - 10

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Super hardening and deformability in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentations

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