Super hardening and deformability in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentations

B. M. Ennis, A. Madan, W. S. Slaughter, S. A. Barnett, S. X. Mao*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

The deformability and superhardening in epitaxially grown W/NbN nanolayers under shallow and deep nanoindentation, were discussed. To investigate the individual interface effect, shallow nanoindentations were made to a depth equal to the individual layer thickness of the epitaxially grown W/NbN nanolayers. It was shown that the increase in hardness is related to the nature of the interface between the layers in the superlattice materials.

Original languageEnglish (US)
Pages (from-to)6892-6898
Number of pages7
JournalJournal of Applied Physics
Volume94
Issue number10
DOIs
StatePublished - Nov 15 2003

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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