Superconducting YBa2Cu3O7-x thin films on silver substrates by in situ plasma-enhanced metalorganic chemical vapor deposition

J. Zhao*, Y. Q. Li, C. S. Chern, P. Norris, B. Gallois, B. Kear, B. W. Wessels

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

27 Scopus citations

Abstract

An in situ microwave plasma-enhanced metalorganic chemical vapor deposition process was used to fabricate highly c-axis oriented YBa2Cu 3O7-x superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740°C in about 270 Pa of N2O ambient. Magnetic susceptibilities versus temperature of the as-deposited films show attainment of zero resistance of 85 K and composition of single (high Tc) phase. X-ray diffraction measurements reveal that the films deposited at 740°C have highly preferential orientation of the crystallite c axes perpendicular to the substrate surface.

Original languageEnglish (US)
Pages (from-to)89-91
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number1
DOIs
StatePublished - 1991

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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