An in situ microwave plasma-enhanced metalorganic chemical vapor deposition process was used to fabricate highly c-axis oriented YBa2Cu 3O7-x superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740°C in about 270 Pa of N2O ambient. Magnetic susceptibilities versus temperature of the as-deposited films show attainment of zero resistance of 85 K and composition of single (high Tc) phase. X-ray diffraction measurements reveal that the films deposited at 740°C have highly preferential orientation of the crystallite c axes perpendicular to the substrate surface.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)