Superconducting YBa2Cu3O7-x thin films on silver substrates by in situ plasma-enhanced metalorganic chemical vapor deposition

J. Zhao; Y. Q. Li; C. S. Chern; P. Norris; B. Gallois; B. Kear; B. W. Wessels

doi:10.1063/1.104400

Superconducting YBa₂Cu₃O_7-x thin films on silver substrates by in situ plasma-enhanced metalorganic chemical vapor deposition

J. Zhao^*, Y. Q. Li, C. S. Chern, P. Norris, B. Gallois, B. Kear, B. W. Wessels

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

An in situ microwave plasma-enhanced metalorganic chemical vapor deposition process was used to fabricate highly c-axis oriented YBa₂Cu ₃O_7-x superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740°C in about 270 Pa of N₂O ambient. Magnetic susceptibilities versus temperature of the as-deposited films show attainment of zero resistance of 85 K and composition of single (high T_c) phase. X-ray diffraction measurements reveal that the films deposited at 740°C have highly preferential orientation of the crystallite c axes perpendicular to the substrate surface.

Original language	English (US)
Pages (from-to)	89-91
Number of pages	3
Journal	Applied Physics Letters
Volume	58
Issue number	1
DOIs	https://doi.org/10.1063/1.104400
State	Published - 1991

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Superconducting YBa2Cu3O7-x thin films on silver substrates by in situ plasma-enhanced metalorganic chemical vapor deposition",

abstract = "An in situ microwave plasma-enhanced metalorganic chemical vapor deposition process was used to fabricate highly c-axis oriented YBa2Cu 3O7-x superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740°C in about 270 Pa of N2O ambient. Magnetic susceptibilities versus temperature of the as-deposited films show attainment of zero resistance of 85 K and composition of single (high Tc) phase. X-ray diffraction measurements reveal that the films deposited at 740°C have highly preferential orientation of the crystallite c axes perpendicular to the substrate surface.",

author = "J. Zhao and Li, {Y. Q.} and Chern, {C. S.} and P. Norris and B. Gallois and B. Kear and Wessels, {B. W.}",

year = "1991",

doi = "10.1063/1.104400",

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AU - Zhao, J.

AU - Li, Y. Q.

AU - Chern, C. S.

AU - Norris, P.

AU - Gallois, B.

AU - Kear, B.

AU - Wessels, B. W.

PY - 1991

Y1 - 1991

N2 - An in situ microwave plasma-enhanced metalorganic chemical vapor deposition process was used to fabricate highly c-axis oriented YBa2Cu 3O7-x superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740°C in about 270 Pa of N2O ambient. Magnetic susceptibilities versus temperature of the as-deposited films show attainment of zero resistance of 85 K and composition of single (high Tc) phase. X-ray diffraction measurements reveal that the films deposited at 740°C have highly preferential orientation of the crystallite c axes perpendicular to the substrate surface.

AB - An in situ microwave plasma-enhanced metalorganic chemical vapor deposition process was used to fabricate highly c-axis oriented YBa2Cu 3O7-x superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740°C in about 270 Pa of N2O ambient. Magnetic susceptibilities versus temperature of the as-deposited films show attainment of zero resistance of 85 K and composition of single (high Tc) phase. X-ray diffraction measurements reveal that the films deposited at 740°C have highly preferential orientation of the crystallite c axes perpendicular to the substrate surface.

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Superconducting YBa₂Cu₃O_7-x thin films on silver substrates by in situ plasma-enhanced metalorganic chemical vapor deposition

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