Superhard coatings of CNx/ZrN multilayers prepared by DC magnetron sputtering

Mei Ling Wu; Wei Da Qian; Yip Wah Chung; Yun Yu Wang; Ming Show Wong; William D. Sproul

doi:10.1016/S0040-6090(97)00429-X

Superhard coatings of CN_x/ZrN multilayers prepared by DC magnetron sputtering

Mei Ling Wu, Wei Da Qian, Yip Wah Chung^*, Yun Yu Wang, Ming Show Wong, William D. Sproul

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

47 Scopus citations

Abstract

CN_x/ZrN multilayers were prepared by a dual-cathode unbalanced DC magnetron sputtering system. The results showed that under proper deposition conditions, the multilayer coatings were dense and fully crystalline with hardness exceeding 40 GPa and elastic modulus over 400 GPa. X-ray diffraction studies showed that there is a strong correlation between coating hardness and the occurrence of (111) texture of ZrN. Some crystalline regions going through the multilayers were clearly observed from the cross-sectional high resolution transmission electron microscopy image. Two extra d-spacings were obtained from the diffraction pattern that do not belong to any known d-spacing for ZrN, but match with two calculated d-spacings for β-C₃N₄.

Original language	English (US)
Pages (from-to)	113-117
Number of pages	5
Journal	Thin Solid Films
Volume	308-309
Issue number	1-4
DOIs	https://doi.org/10.1016/S0040-6090(97)00429-X
State	Published - Oct 31 1997

Keywords

Hardness
Magnetron sputtering
Nanoindentor
X-ray diffraction

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/S0040-6090(97)00429-X

Cite this

@article{f96e64c510d4423f9e8e5587176e3a87,

title = "Superhard coatings of CNx/ZrN multilayers prepared by DC magnetron sputtering",

abstract = "CNx/ZrN multilayers were prepared by a dual-cathode unbalanced DC magnetron sputtering system. The results showed that under proper deposition conditions, the multilayer coatings were dense and fully crystalline with hardness exceeding 40 GPa and elastic modulus over 400 GPa. X-ray diffraction studies showed that there is a strong correlation between coating hardness and the occurrence of (111) texture of ZrN. Some crystalline regions going through the multilayers were clearly observed from the cross-sectional high resolution transmission electron microscopy image. Two extra d-spacings were obtained from the diffraction pattern that do not belong to any known d-spacing for ZrN, but match with two calculated d-spacings for β-C3N4.",

keywords = "Hardness, Magnetron sputtering, Nanoindentor, X-ray diffraction",

author = "Wu, {Mei Ling} and Qian, {Wei Da} and Chung, {Yip Wah} and Wang, {Yun Yu} and Wong, {Ming Show} and Sproul, {William D.}",

note = "Funding Information: This research is sponsored by AFOSRJNA, Grant No. F49620–95–1–0384 (program manager: Dr. A. Pechenik). Nanoindentation and structural studies were supported by the NSF, Grant No. CMS-9520636 (program manager: Dr. Larsen-Basse). We wish to thank J. Wessling for assistance in sputter-deposition. ",

year = "1997",

month = oct,

day = "31",

doi = "10.1016/S0040-6090(97)00429-X",

language = "English (US)",

volume = "308-309",

pages = "113--117",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1-4",

}

TY - JOUR

T1 - Superhard coatings of CNx/ZrN multilayers prepared by DC magnetron sputtering

AU - Wu, Mei Ling

AU - Qian, Wei Da

AU - Chung, Yip Wah

AU - Wang, Yun Yu

AU - Wong, Ming Show

AU - Sproul, William D.

N1 - Funding Information: This research is sponsored by AFOSRJNA, Grant No. F49620–95–1–0384 (program manager: Dr. A. Pechenik). Nanoindentation and structural studies were supported by the NSF, Grant No. CMS-9520636 (program manager: Dr. Larsen-Basse). We wish to thank J. Wessling for assistance in sputter-deposition.

PY - 1997/10/31

Y1 - 1997/10/31

N2 - CNx/ZrN multilayers were prepared by a dual-cathode unbalanced DC magnetron sputtering system. The results showed that under proper deposition conditions, the multilayer coatings were dense and fully crystalline with hardness exceeding 40 GPa and elastic modulus over 400 GPa. X-ray diffraction studies showed that there is a strong correlation between coating hardness and the occurrence of (111) texture of ZrN. Some crystalline regions going through the multilayers were clearly observed from the cross-sectional high resolution transmission electron microscopy image. Two extra d-spacings were obtained from the diffraction pattern that do not belong to any known d-spacing for ZrN, but match with two calculated d-spacings for β-C3N4.

AB - CNx/ZrN multilayers were prepared by a dual-cathode unbalanced DC magnetron sputtering system. The results showed that under proper deposition conditions, the multilayer coatings were dense and fully crystalline with hardness exceeding 40 GPa and elastic modulus over 400 GPa. X-ray diffraction studies showed that there is a strong correlation between coating hardness and the occurrence of (111) texture of ZrN. Some crystalline regions going through the multilayers were clearly observed from the cross-sectional high resolution transmission electron microscopy image. Two extra d-spacings were obtained from the diffraction pattern that do not belong to any known d-spacing for ZrN, but match with two calculated d-spacings for β-C3N4.

KW - Hardness

KW - Magnetron sputtering

KW - Nanoindentor

KW - X-ray diffraction

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U2 - 10.1016/S0040-6090(97)00429-X

DO - 10.1016/S0040-6090(97)00429-X

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AN - SCOPUS:0031248722

SN - 0040-6090

VL - 308-309

SP - 113

EP - 117

JO - Thin Solid Films

JF - Thin Solid Films

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