Superhard coatings of CNx/ZrN multilayers prepared by DC magnetron sputtering

Mei Ling Wu, Wei Da Qian, Yip Wah Chung*, Yun Yu Wang, Ming Show Wong, William D. Sproul

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

47 Scopus citations


CNx/ZrN multilayers were prepared by a dual-cathode unbalanced DC magnetron sputtering system. The results showed that under proper deposition conditions, the multilayer coatings were dense and fully crystalline with hardness exceeding 40 GPa and elastic modulus over 400 GPa. X-ray diffraction studies showed that there is a strong correlation between coating hardness and the occurrence of (111) texture of ZrN. Some crystalline regions going through the multilayers were clearly observed from the cross-sectional high resolution transmission electron microscopy image. Two extra d-spacings were obtained from the diffraction pattern that do not belong to any known d-spacing for ZrN, but match with two calculated d-spacings for β-C3N4.

Original languageEnglish (US)
Pages (from-to)113-117
Number of pages5
JournalThin Solid Films
Issue number1-4
StatePublished - Oct 31 1997


  • Hardness
  • Magnetron sputtering
  • Nanoindentor
  • X-ray diffraction

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


Dive into the research topics of 'Superhard coatings of CNx/ZrN multilayers prepared by DC magnetron sputtering'. Together they form a unique fingerprint.

Cite this