Superhard Nanocomposite of Nitride Superlattices by Opposed-Cathod Unbalanced Magnetron Sputtering

X. Chu, M.S. Wong, W.D. Sproul, S.A. Barnett

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationNanophase and Nanocomposite Materials
EditorsS. Komarneni, J.C. Parker, G.J. Thomas
Place of PublicationPittsburgh
PublisherMRS
StatePublished - 1993

Cite this