Superhard nanocomposite of nitride superlattices by opposed-cathode unbalanced magnetron sputtering

X. Chu*, M. S. Wong, W. D. Sproul, Scott A Barnett

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Scopus citations

Fingerprint

Dive into the research topics of 'Superhard nanocomposite of nitride superlattices by opposed-cathode unbalanced magnetron sputtering'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering