Keyphrases
Superlattices
100%
Superlattice
100%
Nitrides
100%
Unbalanced Magnetron Sputtering
100%
Superhard Nanocomposites
100%
Possible Mechanisms
33%
Layered Structure
33%
Grain Size
33%
Nanograins
33%
Film Growth
33%
Substrate Bias Voltage
33%
Magnetron Sputtering System
33%
Nitrogen Partial Pressure
33%
Rotational Speed
33%
Deposition Parameters
33%
Nanocomposite Film
33%
Substrate Holder
33%
One-step Process
33%
Hardness Enhancement
33%
Tool Steel
33%
Steel Substrate
33%
Layer Materials
33%
Low-energy Ion Bombardment
33%
Sputtering Rate
33%
Superlattice Coating
33%
Nanophase Materials
33%
Material Science
Superlattice
100%
Magnetron Sputtering
100%
Cathode
100%
Nitride Compound
100%
Nanocomposite
100%
Nanostructured Material
14%
Nanocomposite Film
14%
Grain Size
14%
Film
14%
Film Growth
14%
Tool Steel
14%
Ion Bombardment
14%
Engineering
Nitride
100%
Nanocomposites
100%
Magnetron
100%
Superlattice
100%
One Step
14%
Nanometre
14%
Substrate Bias
14%
Bias Voltage
14%
Layered Structure
14%
Step Process
14%
Thin Layer
14%
Individual Layer
14%
Deposition Parameter
14%
Tool Steel
14%
Ion Implantation
14%
Rotating Speed
14%
Polycrystalline
14%
Partial Pressure
14%