Supermirror fabrication via electroforming

Melville P. Ulmer; Robert I. Altkorn; Allen S. Krieger; Daniel R. Parsignault; Yip Wah Chung; M. S. Wong; Barry P. Lai; Derrick C. Mancini; Peter Z. Takacs; Eugene L. Church

doi:10.1117/12.295562

Supermirror fabrication via electroforming

Melville P. Ulmer, Robert I. Altkorn, Allen S. Krieger, Daniel R. Parsignault, Yip Wah Chung, M. S. Wong, Barry P. Lai, Derrick C. Mancini, Peter Z. Takacs, Eugene L. Church

Research output: Contribution to journal › Conference article › peer-review

Abstract

As part of a project to develop methods of placing highly reflective multilayer coatings on the inside of Wolter I mirrors, we have been pursuing a program of measuring flat mirrors. These flats have been produced and examined at various stages of the process we plan to use to fabricate multilayer coated Wolter I mirrors. The flats were measured via optical profiler, AFM, (both done at Brookhaven National Lab) and X-ray reflection (done at the Argonne National Lab Advanced Photon Source). We report for the first time, to our knowledge, the successful placement of multilayers on an electroform by depositing the multilayers on a master and then electroforming onto this master and removing the multilayers, intact, on the electroform. This process is the one we plan to use to place multilayers on the inside of Wolter I optics.

Original language	English (US)
Pages (from-to)	240-249
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3152
DOIs	https://doi.org/10.1117/12.295562
State	Published - 1997
Event	Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors - San Diego, CA, United States Duration: Jul 30 1997 → Jul 30 1997

Keywords

AFM
Multilayers
Profiler
Wolter I
X rays

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.295562

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@article{eeb4009211044c7cb1b67c5cf691274a,

title = "Supermirror fabrication via electroforming",

abstract = "As part of a project to develop methods of placing highly reflective multilayer coatings on the inside of Wolter I mirrors, we have been pursuing a program of measuring flat mirrors. These flats have been produced and examined at various stages of the process we plan to use to fabricate multilayer coated Wolter I mirrors. The flats were measured via optical profiler, AFM, (both done at Brookhaven National Lab) and X-ray reflection (done at the Argonne National Lab Advanced Photon Source). We report for the first time, to our knowledge, the successful placement of multilayers on an electroform by depositing the multilayers on a master and then electroforming onto this master and removing the multilayers, intact, on the electroform. This process is the one we plan to use to place multilayers on the inside of Wolter I optics.",

keywords = "AFM, Multilayers, Profiler, Wolter I, X rays",

author = "Ulmer, {Melville P.} and Altkorn, {Robert I.} and Krieger, {Allen S.} and Parsignault, {Daniel R.} and Chung, {Yip Wah} and Wong, {M. S.} and Lai, {Barry P.} and Mancini, {Derrick C.} and Takacs, {Peter Z.} and Church, {Eugene L.}",

year = "1997",

doi = "10.1117/12.295562",

language = "English (US)",

volume = "3152",

pages = "240--249",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors ; Conference date: 30-07-1997 Through 30-07-1997",

}

TY - JOUR

T1 - Supermirror fabrication via electroforming

AU - Ulmer, Melville P.

AU - Altkorn, Robert I.

AU - Krieger, Allen S.

AU - Parsignault, Daniel R.

AU - Chung, Yip Wah

AU - Wong, M. S.

AU - Lai, Barry P.

AU - Mancini, Derrick C.

AU - Takacs, Peter Z.

AU - Church, Eugene L.

PY - 1997

Y1 - 1997

N2 - As part of a project to develop methods of placing highly reflective multilayer coatings on the inside of Wolter I mirrors, we have been pursuing a program of measuring flat mirrors. These flats have been produced and examined at various stages of the process we plan to use to fabricate multilayer coated Wolter I mirrors. The flats were measured via optical profiler, AFM, (both done at Brookhaven National Lab) and X-ray reflection (done at the Argonne National Lab Advanced Photon Source). We report for the first time, to our knowledge, the successful placement of multilayers on an electroform by depositing the multilayers on a master and then electroforming onto this master and removing the multilayers, intact, on the electroform. This process is the one we plan to use to place multilayers on the inside of Wolter I optics.

AB - As part of a project to develop methods of placing highly reflective multilayer coatings on the inside of Wolter I mirrors, we have been pursuing a program of measuring flat mirrors. These flats have been produced and examined at various stages of the process we plan to use to fabricate multilayer coated Wolter I mirrors. The flats were measured via optical profiler, AFM, (both done at Brookhaven National Lab) and X-ray reflection (done at the Argonne National Lab Advanced Photon Source). We report for the first time, to our knowledge, the successful placement of multilayers on an electroform by depositing the multilayers on a master and then electroforming onto this master and removing the multilayers, intact, on the electroform. This process is the one we plan to use to place multilayers on the inside of Wolter I optics.

KW - AFM

KW - Multilayers

KW - Profiler

KW - Wolter I

KW - X rays

UR - http://www.scopus.com/inward/record.url?scp=58749105697&partnerID=8YFLogxK

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U2 - 10.1117/12.295562

DO - 10.1117/12.295562

M3 - Conference article

AN - SCOPUS:58749105697

VL - 3152

SP - 240

EP - 249

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors

Y2 - 30 July 1997 through 30 July 1997

ER -

Supermirror fabrication via electroforming

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

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