Suppression of spurious modes via dummy electrodes and 2% frequency shift via cavity size selection for 1 GHz AlN MEMS contour-mode resonators

Serkan Yazici*, Marco Giovannini, Nai Kuei Kuo, Gianluca Piazza

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

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Material Science

Engineering