Surface and bulk analysis of metal-organic chemical vapor deposition-derived superconducting Tl2Ba2Ca2Cu3Ox thin films by Auger electron spectroscopy

Enrico Ciliberto, Ignazio L. Fragalá, Graziella Malandrino, Geoffrey C. Allen, Charles M. Younes, Tobin J. Marks*, Darrin S. Richeson, Douglas L. Schulz

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


The surface and bulk chemical compositions of as-deposited and annealed superconducting Tl2Ba2Ca2Cu3Ox thin films have been analyzed by Auger electron spectroscopy (AES). These films are prepared on yttria-stabilized zirconia single-crystal substrates by a combination of metal-organic chemical vapor deposition (MOCVD) and thallium vapor diffusion. BaCaCuO films are first prepared by MOCVD. Thallium is then incorporated into these films by annealing in the presence of a mixture of oxides (Tl2O3, BaO, CaO and CuO) of a specific composition. The as-deposited BaCaCuO films are found to be free of carbon in the interior region. AES depth-profiling experiments reveal consistent atomic homogeneity throughout both the as-deposited BaCaCuO films and the Tl vapor-diffused superconducting films. Apparent intergrowth observed at the substrate-film interface may be due to surface roughness.

Original languageEnglish (US)
Pages (from-to)37-40
Number of pages4
JournalThin Solid Films
Issue number1
StatePublished - Aug 28 1992

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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