Surface micromachined magnetic actuators

Chang Liu*, Tom Tsao, Yu Chong Tai, Chih Ming Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

44 Scopus citations


A surface micromachined micro magnetic actuator(also called a magnetic flap) as an integrated part of an active micro electro-mechanical fluid control system is described here. The flaps are fabricated by surface micromachining technology and are capable of achieving large deflections (above 100μm) with magnetic forces in stationary air. Special microfabrication issues involved in fabricating magnetic flaps with large areas are discussed. Mechanical characterizations of the flaps, including the intrinsic stresses of thin film materials and frequency response, are presented. Thermal actuation is capable of producing large flap displacements and has been theoretically and experimentally studied.

Original languageEnglish (US)
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Number of pages6
ISBN (Print)078031834X
StatePublished - Jan 1 1994
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: Jan 25 1994Jan 28 1994


OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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