Abstract
A surface micromachined micro magnetic actuator(also called a magnetic flap) as an integrated part of an active micro electro-mechanical fluid control system is described here. The flaps are fabricated by surface micromachining technology and are capable of achieving large deflections (above 100μm) with magnetic forces in stationary air. Special microfabrication issues involved in fabricating magnetic flaps with large areas are discussed. Mechanical characterizations of the flaps, including the intrinsic stresses of thin film materials and frequency response, are presented. Thermal actuation is capable of producing large flap displacements and has been theoretically and experimentally studied.
| Original language | English (US) |
|---|---|
| Title of host publication | An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems |
| Publisher | Publ by IEEE |
| Pages | 57-62 |
| Number of pages | 6 |
| ISBN (Print) | 078031834X |
| State | Published - Jan 1 1994 |
| Event | Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Duration: Jan 25 1994 → Jan 28 1994 |
Other
| Other | Proceedings of the IEEE Micro Electro Mechanical Systems |
|---|---|
| City | Oiso, Jpn |
| Period | 1/25/94 → 1/28/94 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering