Laser-induced chemical processes are now being used in a number of new semiconductor processing techniques. We briefly review the technique known as laser microchemistry (or laser direct writing) and describe a device that may be used both as an instrument for laser direct writing and to provide diagnostic information via surface Raman scattering. We include examples from our recent work on deposition of silver from various precursors.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering