Surface Raman Spectroscopy as an In-Situ Probe of Laser Microchemical Processes

Richard P. Van Duyne; Robert I. Altkorn; Kurt L. Haller

doi:10.1109/MCD.1986.6311774

Surface Raman Spectroscopy as an In-Situ Probe of Laser Microchemical Processes

Richard P. Van Duyne, Robert I. Altkorn, Kurt L. Haller

Chemistry

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Laser-induced chemical processes are now being used in a number of new semiconductor processing techniques. We briefly review the technique known as laser microchemistry (or laser direct writing) and describe a device that may be used both as an instrument for laser direct writing and to provide diagnostic information via surface Raman scattering. We include examples from our recent work on deposition of silver from various precursors.

Original language	English (US)
Pages (from-to)	61-66
Number of pages	6
Journal	IEEE Circuits and Devices Magazine
Volume	2
Issue number	1
DOIs	https://doi.org/10.1109/MCD.1986.6311774
State	Published - Jan 1986

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Electrical and Electronic Engineering

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10.1109/MCD.1986.6311774

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title = "Surface Raman Spectroscopy as an In-Situ Probe of Laser Microchemical Processes",

abstract = "Laser-induced chemical processes are now being used in a number of new semiconductor processing techniques. We briefly review the technique known as laser microchemistry (or laser direct writing) and describe a device that may be used both as an instrument for laser direct writing and to provide diagnostic information via surface Raman scattering. We include examples from our recent work on deposition of silver from various precursors.",

author = "{Van Duyne}, {Richard P.} and Altkorn, {Robert I.} and Haller, {Kurt L.}",

year = "1986",

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N2 - Laser-induced chemical processes are now being used in a number of new semiconductor processing techniques. We briefly review the technique known as laser microchemistry (or laser direct writing) and describe a device that may be used both as an instrument for laser direct writing and to provide diagnostic information via surface Raman scattering. We include examples from our recent work on deposition of silver from various precursors.

AB - Laser-induced chemical processes are now being used in a number of new semiconductor processing techniques. We briefly review the technique known as laser microchemistry (or laser direct writing) and describe a device that may be used both as an instrument for laser direct writing and to provide diagnostic information via surface Raman scattering. We include examples from our recent work on deposition of silver from various precursors.

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Surface Raman Spectroscopy as an In-Situ Probe of Laser Microchemical Processes

Abstract

ASJC Scopus subject areas

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