Surface Raman Spectroscopy as an In-Situ Probe of Laser Microchemical Processes

Richard P. Van Duyne, Robert I. Altkorn, Kurt L. Haller

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Laser-induced chemical processes are now being used in a number of new semiconductor processing techniques. We briefly review the technique known as laser microchemistry (or laser direct writing) and describe a device that may be used both as an instrument for laser direct writing and to provide diagnostic information via surface Raman scattering. We include examples from our recent work on deposition of silver from various precursors.

Original languageEnglish (US)
Pages (from-to)61-66
Number of pages6
JournalIEEE Circuits and Devices Magazine
Volume2
Issue number1
DOIs
StatePublished - Jan 1986

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Electrical and Electronic Engineering

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