Synthesis and characterization of CrN/Mo2N multilayers and phases of Molybdenum nitride

Robin Abraham Koshy; Michael E. Graham; Laurence D. Marks

doi:10.1016/j.surfcoat.2007.07.090

Synthesis and characterization of CrN/Mo₂N multilayers and phases of Molybdenum nitride

Robin Abraham Koshy^*, Michael E. Graham, Laurence D. Marks

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

44 Scopus citations

Abstract

CrNx, MoNx, CrOx, MoOx and CrN/Mo₂N multilayer films were deposited by reactive sputtering. Characterization of the coatings was carried out using XRD, XPS, optical profilometer, and nano-indentation. The oxidation of the thin films was studied as a function of annealing temperature. Tribological characterization of the Cr₂O₃ and the Mo-oxides was carried out as a function of annealing temperature. The low friction behavior of MoOx and MoNx was demonstrated. The deposition of CrNx and MoNx was also characterized and multilayer deposition of CrN and Mo₂N was carried out. The hardness of Mo₂N and CrN and the multilayers were shown to lie in the 20-30 GPa hardness regime. The multilayers are stable up to 500 °C in air and up to 1000 °C in argon. Initial friction testing on the multilayer coatings showed an activated self-lubricating mechanism.

Original language	English (US)
Pages (from-to)	1123-1128
Number of pages	6
Journal	Surface and Coatings Technology
Volume	202
Issue number	4-7
DOIs	https://doi.org/10.1016/j.surfcoat.2007.07.090
State	Published - Dec 15 2007

Keywords

CrN/ MoN
In-situ lubrication
Lubricous oxides
Multilayer coatings
Nanolayers
Tool coatings

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2007.07.090

Cite this

@article{5fec1a48e8a4401ab39e1a1092bac97e,

title = "Synthesis and characterization of CrN/Mo2N multilayers and phases of Molybdenum nitride",

abstract = "CrNx, MoNx, CrOx, MoOx and CrN/Mo2N multilayer films were deposited by reactive sputtering. Characterization of the coatings was carried out using XRD, XPS, optical profilometer, and nano-indentation. The oxidation of the thin films was studied as a function of annealing temperature. Tribological characterization of the Cr2O3 and the Mo-oxides was carried out as a function of annealing temperature. The low friction behavior of MoOx and MoNx was demonstrated. The deposition of CrNx and MoNx was also characterized and multilayer deposition of CrN and Mo2N was carried out. The hardness of Mo2N and CrN and the multilayers were shown to lie in the 20-30 GPa hardness regime. The multilayers are stable up to 500 °C in air and up to 1000 °C in argon. Initial friction testing on the multilayer coatings showed an activated self-lubricating mechanism.",

keywords = "CrN/ MoN, In-situ lubrication, Lubricous oxides, Multilayer coatings, Nanolayers, Tool coatings",

author = "Koshy, {Robin Abraham} and Graham, {Michael E.} and Marks, {Laurence D.}",

note = "Funding Information: The work was supported by NSF grant award 0423419. The authors would like to thank Bob Erck (Argonne National Labs) for his help with high temperature test equipment and Ali Erdemir (Argonne National Labs) for his consultation on the project.",

year = "2007",

month = dec,

day = "15",

doi = "10.1016/j.surfcoat.2007.07.090",

language = "English (US)",

volume = "202",

pages = "1123--1128",

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T1 - Synthesis and characterization of CrN/Mo2N multilayers and phases of Molybdenum nitride

AU - Koshy, Robin Abraham

AU - Graham, Michael E.

AU - Marks, Laurence D.

N1 - Funding Information: The work was supported by NSF grant award 0423419. The authors would like to thank Bob Erck (Argonne National Labs) for his help with high temperature test equipment and Ali Erdemir (Argonne National Labs) for his consultation on the project.

PY - 2007/12/15

Y1 - 2007/12/15

N2 - CrNx, MoNx, CrOx, MoOx and CrN/Mo2N multilayer films were deposited by reactive sputtering. Characterization of the coatings was carried out using XRD, XPS, optical profilometer, and nano-indentation. The oxidation of the thin films was studied as a function of annealing temperature. Tribological characterization of the Cr2O3 and the Mo-oxides was carried out as a function of annealing temperature. The low friction behavior of MoOx and MoNx was demonstrated. The deposition of CrNx and MoNx was also characterized and multilayer deposition of CrN and Mo2N was carried out. The hardness of Mo2N and CrN and the multilayers were shown to lie in the 20-30 GPa hardness regime. The multilayers are stable up to 500 °C in air and up to 1000 °C in argon. Initial friction testing on the multilayer coatings showed an activated self-lubricating mechanism.

AB - CrNx, MoNx, CrOx, MoOx and CrN/Mo2N multilayer films were deposited by reactive sputtering. Characterization of the coatings was carried out using XRD, XPS, optical profilometer, and nano-indentation. The oxidation of the thin films was studied as a function of annealing temperature. Tribological characterization of the Cr2O3 and the Mo-oxides was carried out as a function of annealing temperature. The low friction behavior of MoOx and MoNx was demonstrated. The deposition of CrNx and MoNx was also characterized and multilayer deposition of CrN and Mo2N was carried out. The hardness of Mo2N and CrN and the multilayers were shown to lie in the 20-30 GPa hardness regime. The multilayers are stable up to 500 °C in air and up to 1000 °C in argon. Initial friction testing on the multilayer coatings showed an activated self-lubricating mechanism.

KW - CrN/ MoN

KW - In-situ lubrication

KW - Lubricous oxides

KW - Multilayer coatings

KW - Nanolayers

KW - Tool coatings

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