Synthesis and corrosion performance of ultrathin carbon nitride overcoats

Murat U. Guruz, Yuan Hsin Yu, Vinayak P Dravid, Yip-Wah Chung, Monica Lacerda, C. Singh Bhatia

Research output: Contribution to journalArticle

1 Scopus citations


Ultrathin films of carbon nitride were grown using dc magnetron sputtering. A pulsed bias was applied to both the target and the substrate during deposition to help sustain a stable plasma and enhance ion bombardment of the growing film. These films exhibit excellent corrosion resistance at film thickness around 2 nm. Atomic force microscopy measurements reveal an atomically smooth surface. The role of pulsed bias and bombardment by ionized species in obtaining low defect-density coatings is discussed.

Original languageEnglish (US)
Pages (from-to)47-51
Number of pages5
JournalAmerican Society of Mechanical Engineers, Tribology Division, TRIB
StatePublished - Dec 1 1999

ASJC Scopus subject areas

  • Engineering(all)

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