Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas

D. Zhou*, A. R. Krauss, L. C. Qin, T. G. McCauley, D. M. Gruen, T. D. Corrigan, R. P.H. Chang, H. Gnaser

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

197 Scopus citations

Abstract

Nanocrystalline diamond films have been synthesized by microwave plasma enhanced chemical vapor deposition using N2/CH4 as the reactant gas without additional H2. The nanocrystalline diamond phase has been identified by x-ray diffraction and transmission electron microscopy analyses. High resolution secondary ion mass spectroscopy has been employed to measure incorporated nitrogen concentrations up to 8 ×1020 atoms/cm3. Electron field emission measurements give an onset field as low as 3.2 V/μm. The effect of the incorporated nitrogen on the field emission characteristics of the nanocrystalline films is discussed.

Original languageEnglish (US)
Pages (from-to)4546-4550
Number of pages5
JournalJournal of Applied Physics
Volume82
Issue number9
DOIs
StatePublished - Nov 1 1997

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint

Dive into the research topics of 'Synthesis and electron field emission of nanocrystalline diamond thin films grown from N<sub>2</sub>/CH<sub>4</sub> microwave plasmas'. Together they form a unique fingerprint.

Cite this