Synthesis and properties of crystalline carbon nitride composite superhard coatings

Yip-Wah Chung*

*Corresponding author for this work

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

Multilayer carbon nitride/TiN coatings were synthesized using a dual-cathode dc magnetron sputtering system. Fully crystalline films can be obtained when the thickness of the carbon nitride component is on the order of one nm. There appears to be a strong correlation between the occurrence of strong TiN(111) texture and the hardness of these multilayer coatings, as controlled by target powers, nitrogen partial pressure and substrate bias. These coatings can be synthesized at near room temperatures, with smooth surface morphology and hardness in the range of 45-55 GPa.

Original languageEnglish (US)
Pages (from-to)227-233
Number of pages7
JournalMaterials Research Society Symposium - Proceedings
Volume403
StatePublished - Dec 1 1996

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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