Abstract
This paper reports the discovery of a new crystalline thin-film material suitable for tribological applications. Carbon nitride thin films were synthesized using DC magnetron sputtering of a high-purity graphite target in an argon/nitrogen plasma using various substrates held at ambient temperatures. These thin films comist of mixed amorphous and crystalline phases. Unlike previous work, a significant amount of nitrogen, the NIC ratio exceeding 0.4 in the bulk, was incorporated. Infra-red studies showed that nitrogen was bonded to carbon in the film. These films appeared to be very wear-resistant under lubricated sliding conditiom. In dry sliding, carbon nitride gave friction coefficients as low as 0.16, comparable to diamond.
Original language | English (US) |
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Pages (from-to) | 491-495 |
Number of pages | 5 |
Journal | Tribology Transactions |
Volume | 36 |
Issue number | 3 |
DOIs | |
State | Published - Jul 1993 |
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Surfaces and Interfaces
- Surfaces, Coatings and Films