TY - JOUR
T1 - Synthesis of carbon films with ultra-low friction in dry and humid air
AU - Freyman, Christina A.
AU - Chen, Yanfeng
AU - Chung, Yip Wah
N1 - Funding Information:
We gratefully acknowledge many fruitful discussions with Kathy Wahl, Nick Wu, Ray Twesten, and especially Ali Erdemir for his critique of the manuscript. This work was supported by NSF IGERT Grant #DGE-0114429/007. TEM studies were carried out in the Center for Microanalysis of Materials, University of Illinois, which is partially supported by the U.S. Department of Energy under grant DEFG02-91-ER45439. XPS work was carried out at the Keck-II Facility of Northwestern University.
PY - 2006/9/12
Y1 - 2006/9/12
N2 - Using pulsed dc magnetron sputtering, we synthesized hydrogenated amorphous carbon films with and without sulfur doping. These films were smooth and amorphous, with low compressive stress (< 1 GPa). Auger electron spectroscopy confirmed the incorporation of sulfur, and X-ray photoelectron spectroscopy showed that sulfur atoms are chemically bound. Most significant, ball-on-flat tribo-testing showed that hydrogenated carbon films doped with 5 at.% sulfur have ultra-low friction coefficients (< 0.01) in air with relative humidity from 0% to 50%.
AB - Using pulsed dc magnetron sputtering, we synthesized hydrogenated amorphous carbon films with and without sulfur doping. These films were smooth and amorphous, with low compressive stress (< 1 GPa). Auger electron spectroscopy confirmed the incorporation of sulfur, and X-ray photoelectron spectroscopy showed that sulfur atoms are chemically bound. Most significant, ball-on-flat tribo-testing showed that hydrogenated carbon films doped with 5 at.% sulfur have ultra-low friction coefficients (< 0.01) in air with relative humidity from 0% to 50%.
KW - Friction
KW - Hydrogenated carbon films
KW - Magnetron sputtering
KW - Sulfur doping
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U2 - 10.1016/j.surfcoat.2005.11.075
DO - 10.1016/j.surfcoat.2005.11.075
M3 - Article
AN - SCOPUS:33745953535
SN - 0257-8972
VL - 201
SP - 164
EP - 167
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
IS - 1-2
ER -