Synthesis of carbon films with ultra-low friction in dry and humid air

Christina A. Freyman, Yanfeng Chen, Yip Wah Chung*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

40 Scopus citations


Using pulsed dc magnetron sputtering, we synthesized hydrogenated amorphous carbon films with and without sulfur doping. These films were smooth and amorphous, with low compressive stress (< 1 GPa). Auger electron spectroscopy confirmed the incorporation of sulfur, and X-ray photoelectron spectroscopy showed that sulfur atoms are chemically bound. Most significant, ball-on-flat tribo-testing showed that hydrogenated carbon films doped with 5 at.% sulfur have ultra-low friction coefficients (< 0.01) in air with relative humidity from 0% to 50%.

Original languageEnglish (US)
Pages (from-to)164-167
Number of pages4
JournalSurface and Coatings Technology
Issue number1-2
StatePublished - Sep 12 2006


  • Friction
  • Hydrogenated carbon films
  • Magnetron sputtering
  • Sulfur doping

ASJC Scopus subject areas

  • General Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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