Synthesis of nanoporous activated iridium oxide films by anodized aluminum oxide templated atomic layer deposition

David J. Comstock; Steven T. Christensen; Jeffrey W. Elam; Michael J. Pellin; Mark C. Hersam

doi:10.1016/j.elecom.2010.08.029

Synthesis of nanoporous activated iridium oxide films by anodized aluminum oxide templated atomic layer deposition

David J. Comstock, Steven T. Christensen, Jeffrey W. Elam, Michael J. Pellin, Mark C. Hersam

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

Iridium oxide (IrOx) has been widely studied due to its applications in electrochromic devices, pH sensing, and neural stimulation. Previous work has demonstrated that both Ir and IrOx films with porous morphologies prepared by sputtering exhibit significantly enhanced charge storage capacities. However, sputtering provides only limited control over film porosity. In this work, we demonstrate an alternative scheme for synthesizing nanoporous Ir and activated IrOx films (AIROFs). This scheme utilizes atomic layer deposition to deposit a thin conformal Ir film within a nanoporous anodized aluminum oxide template. The Ir film is then activated by potential cycling in 0.1 M H₂SO ₄ to form a nanoporous AIROF. The morphologies and electrochemical properties of the films are characterized by scanning electron microscopy and cyclic voltammetry, respectively. The resulting nanoporous AIROFs exhibit a nanoporous morphology and enhanced cathodal charge storage capacities as large as 311 mC/cm².

Original language	English (US)
Pages (from-to)	1543-1546
Number of pages	4
Journal	Electrochemistry Communications
Volume	12
Issue number	11
DOIs	https://doi.org/10.1016/j.elecom.2010.08.029
State	Published - Nov 2010

Funding

This work was supported by the Army Research Office ( ARO W911NF-05-1-0177 ) and the National Science Foundation ( NSF ECS-0609064 ). This research made use of public facilities within the NUANCE Center, which is supported by NSF-NSEC, NSF-MRSEC, Keck Foundation, the State of Illinois, and Northwestern University. D. J. Comstock further acknowledges support from an NDSEG Fellowship. Argonne National Laboratory is a U.S. Department of Energy Office of Science Laboratory operated under Contract No. DE-AC02-06CH11357 by UChicago Argonne, LLC.

Keywords

Anodized aluminum oxide
Atomic layer deposition
Iridium
Iridium oxide
Nanoporous
Templated deposition

ASJC Scopus subject areas

Electrochemistry

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10.1016/j.elecom.2010.08.029

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title = "Synthesis of nanoporous activated iridium oxide films by anodized aluminum oxide templated atomic layer deposition",

abstract = "Iridium oxide (IrOx) has been widely studied due to its applications in electrochromic devices, pH sensing, and neural stimulation. Previous work has demonstrated that both Ir and IrOx films with porous morphologies prepared by sputtering exhibit significantly enhanced charge storage capacities. However, sputtering provides only limited control over film porosity. In this work, we demonstrate an alternative scheme for synthesizing nanoporous Ir and activated IrOx films (AIROFs). This scheme utilizes atomic layer deposition to deposit a thin conformal Ir film within a nanoporous anodized aluminum oxide template. The Ir film is then activated by potential cycling in 0.1 M H2SO 4 to form a nanoporous AIROF. The morphologies and electrochemical properties of the films are characterized by scanning electron microscopy and cyclic voltammetry, respectively. The resulting nanoporous AIROFs exhibit a nanoporous morphology and enhanced cathodal charge storage capacities as large as 311 mC/cm2.",

keywords = "Anodized aluminum oxide, Atomic layer deposition, Iridium, Iridium oxide, Nanoporous, Templated deposition",

author = "Comstock, \{David J.\} and Christensen, \{Steven T.\} and Elam, \{Jeffrey W.\} and Pellin, \{Michael J.\} and Hersam, \{Mark C.\}",

note = "Funding Information: This work was supported by the Army Research Office ( ARO W911NF-05-1-0177 ) and the National Science Foundation ( NSF ECS-0609064 ). This research made use of public facilities within the NUANCE Center, which is supported by NSF-NSEC, NSF-MRSEC, Keck Foundation, the State of Illinois, and Northwestern University. D. J. Comstock further acknowledges support from an NDSEG Fellowship. Argonne National Laboratory is a U.S. Department of Energy Office of Science Laboratory operated under Contract No. DE-AC02-06CH11357 by UChicago Argonne, LLC. ",

year = "2010",

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journal = "Electrochemistry Communications",

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AU - Christensen, Steven T.

AU - Elam, Jeffrey W.

AU - Pellin, Michael J.

AU - Hersam, Mark C.

N1 - Funding Information: This work was supported by the Army Research Office ( ARO W911NF-05-1-0177 ) and the National Science Foundation ( NSF ECS-0609064 ). This research made use of public facilities within the NUANCE Center, which is supported by NSF-NSEC, NSF-MRSEC, Keck Foundation, the State of Illinois, and Northwestern University. D. J. Comstock further acknowledges support from an NDSEG Fellowship. Argonne National Laboratory is a U.S. Department of Energy Office of Science Laboratory operated under Contract No. DE-AC02-06CH11357 by UChicago Argonne, LLC.

PY - 2010/11

Y1 - 2010/11

N2 - Iridium oxide (IrOx) has been widely studied due to its applications in electrochromic devices, pH sensing, and neural stimulation. Previous work has demonstrated that both Ir and IrOx films with porous morphologies prepared by sputtering exhibit significantly enhanced charge storage capacities. However, sputtering provides only limited control over film porosity. In this work, we demonstrate an alternative scheme for synthesizing nanoporous Ir and activated IrOx films (AIROFs). This scheme utilizes atomic layer deposition to deposit a thin conformal Ir film within a nanoporous anodized aluminum oxide template. The Ir film is then activated by potential cycling in 0.1 M H2SO 4 to form a nanoporous AIROF. The morphologies and electrochemical properties of the films are characterized by scanning electron microscopy and cyclic voltammetry, respectively. The resulting nanoporous AIROFs exhibit a nanoporous morphology and enhanced cathodal charge storage capacities as large as 311 mC/cm2.

AB - Iridium oxide (IrOx) has been widely studied due to its applications in electrochromic devices, pH sensing, and neural stimulation. Previous work has demonstrated that both Ir and IrOx films with porous morphologies prepared by sputtering exhibit significantly enhanced charge storage capacities. However, sputtering provides only limited control over film porosity. In this work, we demonstrate an alternative scheme for synthesizing nanoporous Ir and activated IrOx films (AIROFs). This scheme utilizes atomic layer deposition to deposit a thin conformal Ir film within a nanoporous anodized aluminum oxide template. The Ir film is then activated by potential cycling in 0.1 M H2SO 4 to form a nanoporous AIROF. The morphologies and electrochemical properties of the films are characterized by scanning electron microscopy and cyclic voltammetry, respectively. The resulting nanoporous AIROFs exhibit a nanoporous morphology and enhanced cathodal charge storage capacities as large as 311 mC/cm2.

KW - Anodized aluminum oxide

KW - Atomic layer deposition

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KW - Iridium oxide

KW - Nanoporous

KW - Templated deposition

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Synthesis of nanoporous activated iridium oxide films by anodized aluminum oxide templated atomic layer deposition

Abstract

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