Synthesis of nanoporous activated iridium oxide films by anodized aluminum oxide templated atomic layer deposition

David J. Comstock, Steven T. Christensen, Jeffrey W. Elam, Michael J. Pellin, Mark C. Hersam

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Abstract

Iridium oxide (IrOx) has been widely studied due to its applications in electrochromic devices, pH sensing, and neural stimulation. Previous work has demonstrated that both Ir and IrOx films with porous morphologies prepared by sputtering exhibit significantly enhanced charge storage capacities. However, sputtering provides only limited control over film porosity. In this work, we demonstrate an alternative scheme for synthesizing nanoporous Ir and activated IrOx films (AIROFs). This scheme utilizes atomic layer deposition to deposit a thin conformal Ir film within a nanoporous anodized aluminum oxide template. The Ir film is then activated by potential cycling in 0.1 M H2SO 4 to form a nanoporous AIROF. The morphologies and electrochemical properties of the films are characterized by scanning electron microscopy and cyclic voltammetry, respectively. The resulting nanoporous AIROFs exhibit a nanoporous morphology and enhanced cathodal charge storage capacities as large as 311 mC/cm2.

Original languageEnglish (US)
Pages (from-to)1543-1546
Number of pages4
JournalElectrochemistry Communications
Volume12
Issue number11
DOIs
StatePublished - Nov 2010

Funding

This work was supported by the Army Research Office ( ARO W911NF-05-1-0177 ) and the National Science Foundation ( NSF ECS-0609064 ). This research made use of public facilities within the NUANCE Center, which is supported by NSF-NSEC, NSF-MRSEC, Keck Foundation, the State of Illinois, and Northwestern University. D. J. Comstock further acknowledges support from an NDSEG Fellowship. Argonne National Laboratory is a U.S. Department of Energy Office of Science Laboratory operated under Contract No. DE-AC02-06CH11357 by UChicago Argonne, LLC.

Keywords

  • Anodized aluminum oxide
  • Atomic layer deposition
  • Iridium
  • Iridium oxide
  • Nanoporous
  • Templated deposition

ASJC Scopus subject areas

  • Electrochemistry

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