Crystalline carbon nitride/TiN composite coatings have been deposited using a dual-cathode magnetron sputtering system onto polished silicon and M2 steel substrates held at room temperature. We propose that TiN provides a lattice-matched structural template to seed the growth of carbon nitride crystallites. The resulting coatings are smooth, fully crystalline, with nanoindentation hardness in the range of 45-55 GPa. This hardness is in the low-end range of diamond films. Suggestions for better seeding materials to further improve the hardness are proposed.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)