Synthesis of superhard carbon nitride composite coatings

Dong Li; Xi Chu; Shang Cong Cheng; Xi Wei Lin; Vinayak P. Dravid; Yip Wah Chung; Ming Show Wong; William D. Sproul

doi:10.1063/1.114667

Synthesis of superhard carbon nitride composite coatings

Dong Li^*, Xi Chu, Shang Cong Cheng, Xi Wei Lin, Vinayak P. Dravid, Yip Wah Chung, Ming Show Wong, William D. Sproul

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

134 Scopus citations

Abstract

Crystalline carbon nitride/TiN composite coatings have been deposited using a dual-cathode magnetron sputtering system onto polished silicon and M2 steel substrates held at room temperature. We propose that TiN provides a lattice-matched structural template to seed the growth of carbon nitride crystallites. The resulting coatings are smooth, fully crystalline, with nanoindentation hardness in the range of 45-55 GPa. This hardness is in the low-end range of diamond films. Suggestions for better seeding materials to further improve the hardness are proposed.

Original language	English (US)
Pages (from-to)	203
Number of pages	1
Journal	Applied Physics Letters
Volume	67
DOIs	https://doi.org/10.1063/1.114667
State	Published - 1995

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Synthesis of superhard carbon nitride composite coatings",

abstract = "Crystalline carbon nitride/TiN composite coatings have been deposited using a dual-cathode magnetron sputtering system onto polished silicon and M2 steel substrates held at room temperature. We propose that TiN provides a lattice-matched structural template to seed the growth of carbon nitride crystallites. The resulting coatings are smooth, fully crystalline, with nanoindentation hardness in the range of 45-55 GPa. This hardness is in the low-end range of diamond films. Suggestions for better seeding materials to further improve the hardness are proposed.",

author = "Dong Li and Xi Chu and Cheng, {Shang Cong} and Lin, {Xi Wei} and Dravid, {Vinayak P.} and Chung, {Yip Wah} and Wong, {Ming Show} and Sproul, {William D.}",

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doi = "10.1063/1.114667",

language = "English (US)",

volume = "67",

pages = "203",

journal = "Applied Physics Letters",

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T1 - Synthesis of superhard carbon nitride composite coatings

AU - Li, Dong

AU - Chu, Xi

AU - Cheng, Shang Cong

AU - Lin, Xi Wei

AU - Dravid, Vinayak P.

AU - Chung, Yip Wah

AU - Wong, Ming Show

AU - Sproul, William D.

PY - 1995

Y1 - 1995

N2 - Crystalline carbon nitride/TiN composite coatings have been deposited using a dual-cathode magnetron sputtering system onto polished silicon and M2 steel substrates held at room temperature. We propose that TiN provides a lattice-matched structural template to seed the growth of carbon nitride crystallites. The resulting coatings are smooth, fully crystalline, with nanoindentation hardness in the range of 45-55 GPa. This hardness is in the low-end range of diamond films. Suggestions for better seeding materials to further improve the hardness are proposed.

AB - Crystalline carbon nitride/TiN composite coatings have been deposited using a dual-cathode magnetron sputtering system onto polished silicon and M2 steel substrates held at room temperature. We propose that TiN provides a lattice-matched structural template to seed the growth of carbon nitride crystallites. The resulting coatings are smooth, fully crystalline, with nanoindentation hardness in the range of 45-55 GPa. This hardness is in the low-end range of diamond films. Suggestions for better seeding materials to further improve the hardness are proposed.

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SN - 0003-6951

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JO - Applied Physics Letters

JF - Applied Physics Letters

ER -

Synthesis of superhard carbon nitride composite coatings

Abstract

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