Synthesis of superhard carbon nitride composite coatings

Dong Li*, Xi Chu, Shang Cong Cheng, Xi Wei Lin, Vinayak P. Dravid, Yip Wah Chung, Ming Show Wong, William D. Sproul

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

137 Scopus citations

Abstract

Crystalline carbon nitride/TiN composite coatings have been deposited using a dual-cathode magnetron sputtering system onto polished silicon and M2 steel substrates held at room temperature. We propose that TiN provides a lattice-matched structural template to seed the growth of carbon nitride crystallites. The resulting coatings are smooth, fully crystalline, with nanoindentation hardness in the range of 45-55 GPa. This hardness is in the low-end range of diamond films. Suggestions for better seeding materials to further improve the hardness are proposed.

Original languageEnglish (US)
Pages (from-to)203
Number of pages1
JournalApplied Physics Letters
Volume67
DOIs
StatePublished - 1995

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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