SYSTEM AND METHODS OF LASER ASSISTED FIELD INDUCED OXIDE NANOPATTERNING

Research output: Patent

Cite this

@misc{a43a5b5dc18b4b56a4d88d5f5181d137,

title = "SYSTEM AND METHODS OF LASER ASSISTED FIELD INDUCED OXIDE NANOPATTERNING",

author = "Mark Hersam",

note = "filingdate: 2008-7-25 issueddate: 2011-7-12 Status: published attorneydocketnumber: 2007-096-02; 7976765",

year = "2009",

month = apr,

day = "2",

language = "Undefined/Unknown",

type = "Patent",

}