Abstract
Atom-probe tomography (APT) is a unique analysis tool that enables true three-dimensional (3-D) analyses with sub-nano scale spatial resolution. Recent implementations of the local-electrode atom-probe (LEAP) tomograph with ultraviolet laser pulsing have significantly expanded the research applications of APT. The small field-of-view of a needle-shaped specimen with a less than 100 nm diam. is, however, a major limitation for analyzing materials. The systematic approaches for site-specific targeting of an APT nanotip in a transmission electron microscope (TEM) of a thin sample are introduced to solve the geometrical limitations of a sharpened APT nanotip. In addition to “coupling APT to TEM” the technique presented here allows for targeting the preparation of an APT tip based on TEM observation of a much larger area than what is captured in the APT tip. The correlative methods have synergies for not only high-resolution structural analyses but also for obtaining chemical information. Chemical analyses in a TEM, both energy-dispersive X-ray spectroscopy (EDS) and electron energy-loss spectroscopy (EELS), are performed and compared with the APT chemical analyses of a carbide phase (M7C3) precipitate at a grain boundary in a Ni-based alloy. Additionally, a TEM image of a sharpened APT nanotip is utilized for calculation of the detection area ratio of an APT nanotip by comparison with a TEM image for precise tomographic reconstructions. A grain-boundary/carbide precipitate triple junction is used to attain precise positioning of an APT nanotip in an analyzed TEM specimen.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 284-292 |
| Number of pages | 9 |
| Journal | Ultramicroscopy |
| Volume | 184 |
| DOIs | |
| State | Published - Jan 1 2018 |
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Keywords
- 3-D reconstruction
- Atom probe tomography (APT)
- Correlative study
- Metal-carbide phase precipitate
- Sample preparation
- Transmission electron microscope (TEM)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Instrumentation
Cite this
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Systematic approaches for targeting an atom-probe tomography sample fabricated in a thin TEM specimen : Correlative structural, chemical and 3-D reconstruction analyses. / Baik, Sung Il; Isheim, Dieter; Seidman, David N.
In: Ultramicroscopy, Vol. 184, 01.01.2018, p. 284-292.Research output: Contribution to journal › Article
TY - JOUR
T1 - Systematic approaches for targeting an atom-probe tomography sample fabricated in a thin TEM specimen
T2 - Correlative structural, chemical and 3-D reconstruction analyses
AU - Baik, Sung Il
AU - Isheim, Dieter
AU - Seidman, David N
PY - 2018/1/1
Y1 - 2018/1/1
N2 - Atom-probe tomography (APT) is a unique analysis tool that enables true three-dimensional (3-D) analyses with sub-nano scale spatial resolution. Recent implementations of the local-electrode atom-probe (LEAP) tomograph with ultraviolet laser pulsing have significantly expanded the research applications of APT. The small field-of-view of a needle-shaped specimen with a less than 100 nm diam. is, however, a major limitation for analyzing materials. The systematic approaches for site-specific targeting of an APT nanotip in a transmission electron microscope (TEM) of a thin sample are introduced to solve the geometrical limitations of a sharpened APT nanotip. In addition to “coupling APT to TEM” the technique presented here allows for targeting the preparation of an APT tip based on TEM observation of a much larger area than what is captured in the APT tip. The correlative methods have synergies for not only high-resolution structural analyses but also for obtaining chemical information. Chemical analyses in a TEM, both energy-dispersive X-ray spectroscopy (EDS) and electron energy-loss spectroscopy (EELS), are performed and compared with the APT chemical analyses of a carbide phase (M7C3) precipitate at a grain boundary in a Ni-based alloy. Additionally, a TEM image of a sharpened APT nanotip is utilized for calculation of the detection area ratio of an APT nanotip by comparison with a TEM image for precise tomographic reconstructions. A grain-boundary/carbide precipitate triple junction is used to attain precise positioning of an APT nanotip in an analyzed TEM specimen.
AB - Atom-probe tomography (APT) is a unique analysis tool that enables true three-dimensional (3-D) analyses with sub-nano scale spatial resolution. Recent implementations of the local-electrode atom-probe (LEAP) tomograph with ultraviolet laser pulsing have significantly expanded the research applications of APT. The small field-of-view of a needle-shaped specimen with a less than 100 nm diam. is, however, a major limitation for analyzing materials. The systematic approaches for site-specific targeting of an APT nanotip in a transmission electron microscope (TEM) of a thin sample are introduced to solve the geometrical limitations of a sharpened APT nanotip. In addition to “coupling APT to TEM” the technique presented here allows for targeting the preparation of an APT tip based on TEM observation of a much larger area than what is captured in the APT tip. The correlative methods have synergies for not only high-resolution structural analyses but also for obtaining chemical information. Chemical analyses in a TEM, both energy-dispersive X-ray spectroscopy (EDS) and electron energy-loss spectroscopy (EELS), are performed and compared with the APT chemical analyses of a carbide phase (M7C3) precipitate at a grain boundary in a Ni-based alloy. Additionally, a TEM image of a sharpened APT nanotip is utilized for calculation of the detection area ratio of an APT nanotip by comparison with a TEM image for precise tomographic reconstructions. A grain-boundary/carbide precipitate triple junction is used to attain precise positioning of an APT nanotip in an analyzed TEM specimen.
KW - 3-D reconstruction
KW - Atom probe tomography (APT)
KW - Correlative study
KW - Metal-carbide phase precipitate
KW - Sample preparation
KW - Transmission electron microscope (TEM)
UR - http://www.scopus.com/inward/record.url?scp=85031732649&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85031732649&partnerID=8YFLogxK
U2 - 10.1016/j.ultramic.2017.10.007
DO - 10.1016/j.ultramic.2017.10.007
M3 - Article
VL - 184
SP - 284
EP - 292
JO - Ultramicroscopy
JF - Ultramicroscopy
SN - 0304-3991
ER -