Techniques and applications for non-planar lithography

John A. Rogers*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

Certain classes of three dimensional nanostructures can be fabricated by contact printing patterns onto curved or non-flat surfaces. This paper reviews some of our work that demonstrates this approach by using microcontact printing to form a range of three dimensional structures with feature sizes as small as 1-2 microns and it demonstrates their use in a variety of functional devices. We also describe a nanotransfer printing technique with operational characteristics that are similar to those of microcontact printing but which enables nanometer resolution. High resolution replica molding techniques provide a method for producing copies of some of these printed structures.

Original languageEnglish (US)
Pages (from-to)31-38
Number of pages8
JournalMaterials Research Society Symposium - Proceedings
Volume739
DOIs
StatePublished - Jan 1 2002
EventThree-Dimensional Nanoengineered Assemblies - Boston, MA, United States
Duration: Dec 1 2002Dec 5 2002

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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