The Chemical Vapor Deposition of Polycrystalline InP

Masahide Inuishi, Bruce W. Wessels

Research output: Contribution to journalArticlepeer-review

7 Scopus citations
Original languageEnglish (US)
Pages (from-to)2747-2750
Number of pages4
JournalJournal of the Electrochemical Society
Volume127
Issue number12
DOIs
StatePublished - Dec 1980

Keywords

  • polycrystalline semiconductors
  • thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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