The effects of island diffusion and breakup in island growth during ion-beam assisted deposition

M. Rusanen*, I. Koponen, J. Heinonen, J. Sillanpää

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

In ion-beam assisted deposition (IBAD) island growth is in clear contrast with growth obtained without a bombardment. In this contribution we study the effects of island mobility and island breakup in IBAD by computer simulations. It is shown that during the initial stage of growth a scaling description similar to irreversible growth applies. However, eventually growth attains a quasi-stationary state where aggregation is balanced by breakup and a new scaling behaviour occurs. A generalised scaling description that bridges the initial and final stages of growth is presented and its validity is confirmed by simulations. The results of this simplified model are shown to be in qualitative agreement with recent experiments.

Original languageEnglish (US)
Pages (from-to)116-120
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume148
Issue number1-4
DOIs
StatePublished - 1999

Keywords

  • IBAD
  • Island growth
  • Scaling
  • Simulations

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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