The effects of island diffusion and breakup in island growth during ion-beam assisted deposition

M. Rusanen; I. Koponen; J. Heinonen; J. Sillanpää

doi:10.1016/S0168-583X(98)00754-X

The effects of island diffusion and breakup in island growth during ion-beam assisted deposition

M. Rusanen^*, I. Koponen, J. Heinonen, J. Sillanpää

^*Corresponding author for this work

Radiation Oncology

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

In ion-beam assisted deposition (IBAD) island growth is in clear contrast with growth obtained without a bombardment. In this contribution we study the effects of island mobility and island breakup in IBAD by computer simulations. It is shown that during the initial stage of growth a scaling description similar to irreversible growth applies. However, eventually growth attains a quasi-stationary state where aggregation is balanced by breakup and a new scaling behaviour occurs. A generalised scaling description that bridges the initial and final stages of growth is presented and its validity is confirmed by simulations. The results of this simplified model are shown to be in qualitative agreement with recent experiments.

Original language	English (US)
Pages (from-to)	116-120
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	148
Issue number	1-4
DOIs	https://doi.org/10.1016/S0168-583X(98)00754-X
State	Published - 1999

Keywords

IBAD
Island growth
Scaling
Simulations

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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10.1016/S0168-583X(98)00754-X

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title = "The effects of island diffusion and breakup in island growth during ion-beam assisted deposition",

abstract = "In ion-beam assisted deposition (IBAD) island growth is in clear contrast with growth obtained without a bombardment. In this contribution we study the effects of island mobility and island breakup in IBAD by computer simulations. It is shown that during the initial stage of growth a scaling description similar to irreversible growth applies. However, eventually growth attains a quasi-stationary state where aggregation is balanced by breakup and a new scaling behaviour occurs. A generalised scaling description that bridges the initial and final stages of growth is presented and its validity is confirmed by simulations. The results of this simplified model are shown to be in qualitative agreement with recent experiments.",

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T1 - The effects of island diffusion and breakup in island growth during ion-beam assisted deposition

AU - Rusanen, M.

AU - Koponen, I.

AU - Heinonen, J.

AU - Sillanpää, J.

PY - 1999

Y1 - 1999

N2 - In ion-beam assisted deposition (IBAD) island growth is in clear contrast with growth obtained without a bombardment. In this contribution we study the effects of island mobility and island breakup in IBAD by computer simulations. It is shown that during the initial stage of growth a scaling description similar to irreversible growth applies. However, eventually growth attains a quasi-stationary state where aggregation is balanced by breakup and a new scaling behaviour occurs. A generalised scaling description that bridges the initial and final stages of growth is presented and its validity is confirmed by simulations. The results of this simplified model are shown to be in qualitative agreement with recent experiments.

AB - In ion-beam assisted deposition (IBAD) island growth is in clear contrast with growth obtained without a bombardment. In this contribution we study the effects of island mobility and island breakup in IBAD by computer simulations. It is shown that during the initial stage of growth a scaling description similar to irreversible growth applies. However, eventually growth attains a quasi-stationary state where aggregation is balanced by breakup and a new scaling behaviour occurs. A generalised scaling description that bridges the initial and final stages of growth is presented and its validity is confirmed by simulations. The results of this simplified model are shown to be in qualitative agreement with recent experiments.

KW - IBAD

KW - Island growth

KW - Scaling

KW - Simulations

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JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -

The effects of island diffusion and breakup in island growth during ion-beam assisted deposition

Abstract

Keywords

ASJC Scopus subject areas

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