Abstract
In ion-beam assisted deposition (IBAD) island growth is in clear contrast with growth obtained without a bombardment. In this contribution we study the effects of island mobility and island breakup in IBAD by computer simulations. It is shown that during the initial stage of growth a scaling description similar to irreversible growth applies. However, eventually growth attains a quasi-stationary state where aggregation is balanced by breakup and a new scaling behaviour occurs. A generalised scaling description that bridges the initial and final stages of growth is presented and its validity is confirmed by simulations. The results of this simplified model are shown to be in qualitative agreement with recent experiments.
Original language | English (US) |
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Pages (from-to) | 116-120 |
Number of pages | 5 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 148 |
Issue number | 1-4 |
DOIs | |
State | Published - 1999 |
Keywords
- IBAD
- Island growth
- Scaling
- Simulations
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation