The evolution of hard x-ray tomography from the micrometer to the nanometer length scale

C. Rau*, K. M. Peterson, P. R. Jemian, T. Terry, M. Harris, S. Vogt, Claus-Peter Richter, U. Neuhäusler, G. Schneider, I. K. Robinson

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations

Abstract

For several years efforts have been made to improve the resolution for imaging and tomography with hard X-rays. Recently we demonstrated sub-100 nm resolution at 13 keV with a microscope including a Kirkpatrick-Baez multilayer-mirror (KB) as a condenser followed by a micro-Fresnel Zone Plate (FZP) as an objective lens. We built since a new tomography station at UNICAT at the Advanced Photon Source integrating the KB-FZP microscope for 100nm tomography.

Original languageEnglish (US)
Article number79
Pages (from-to)709-714
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5535
DOIs
StatePublished - 2004
EventDevelopments in X-Ray Tomography IV - Denver, CO, United States
Duration: Aug 4 2004Aug 6 2004

Keywords

  • Fresnel Zone Plate
  • Full-field microscopy
  • Hard x-rays
  • Kirkpatrick-Baez mirror
  • Tomography

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'The evolution of hard x-ray tomography from the micrometer to the nanometer length scale'. Together they form a unique fingerprint.

Cite this