TY - JOUR
T1 - The influence of the substrate misorientation on the structural quality of GaN layers grown by HVPE
AU - Liliental-Weber, Z.
AU - dos Reis, Roberto
AU - Sochacki, T.
AU - Bockowski, M.
N1 - Funding Information:
Electron microscopy research by Z.L-W and R. dos R. at the Molecular Foundry was supported by the Director, Office of Science, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering, of the GaN crystal growth research by T.S, and M. B. was supported by the U.S. Department of Energy under Contract No. DE-AC02-05CH11231 . Department of the Navy, Office of Naval Research ( ONRG - NICOP -N62909-17-1-2004 ) and by Polish National Science Center.
Funding Information:
Electron microscopy research by Z.L-W and R. dos R. at the Molecular Foundry was supported by the Director, Office of Science, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. GaN crystal growth research by T.S, and M. B. was supported by the Department of the Navy, Office of Naval Research (ONRG - NICOP -N62909-17-1-2004) and by Polish National Science Center.
Publisher Copyright:
© 2018
PY - 2018/9/15
Y1 - 2018/9/15
N2 - The paper describes a Transmission Electron Microscopy study on the structural quality of GaN samples grown by Hydride Vapor Phase Epitaxy (HVPE) on ammonothermal (Am) GaN seeds. The only difference between these samples is the crystallographic direction of misorientation of the Am GaN seeds for the further growth. The studied samples were 1° misoriented in two perpendicular crystallographic directions: the [1 1 0 0] and the [1 1 2 0]. Cross-section samples were studied and showed that growth of homo-epitaxial GaN on the substrate tilted toward the [1 1 0 0] direction appeared to lead to lower defect density than those tilted toward the [1 1 2 0] direction. This was associated with slow growth on {1 0 1 1} planes that are oriented “edge-on” for the growth along [1 1 2 0] direction leading to the formation of facets while the [1 1 0 0] direction is devoid of such facets. The competition between slow and fast growth rates on particular planes would lead to the change of the crystal shape such as triangle or trapezoidal one. Our present study also found that cracks in the samples tilted toward the [1 1 2 0] direction are formed and they are the origin for half loops. Moreover, dislocation propagation from these cracks is observed. Such cracks were not observed for the samples tilted toward the [1 1 0 0] directions, probably due to more uniform growth. There were no dislocations at the sample surface. However, some parasitic growth occurred on the wafer edges for both samples. Cross-section microscopy found high dislocation density in these areas with and a majority of them are edge dislocations.
AB - The paper describes a Transmission Electron Microscopy study on the structural quality of GaN samples grown by Hydride Vapor Phase Epitaxy (HVPE) on ammonothermal (Am) GaN seeds. The only difference between these samples is the crystallographic direction of misorientation of the Am GaN seeds for the further growth. The studied samples were 1° misoriented in two perpendicular crystallographic directions: the [1 1 0 0] and the [1 1 2 0]. Cross-section samples were studied and showed that growth of homo-epitaxial GaN on the substrate tilted toward the [1 1 0 0] direction appeared to lead to lower defect density than those tilted toward the [1 1 2 0] direction. This was associated with slow growth on {1 0 1 1} planes that are oriented “edge-on” for the growth along [1 1 2 0] direction leading to the formation of facets while the [1 1 0 0] direction is devoid of such facets. The competition between slow and fast growth rates on particular planes would lead to the change of the crystal shape such as triangle or trapezoidal one. Our present study also found that cracks in the samples tilted toward the [1 1 2 0] direction are formed and they are the origin for half loops. Moreover, dislocation propagation from these cracks is observed. Such cracks were not observed for the samples tilted toward the [1 1 0 0] directions, probably due to more uniform growth. There were no dislocations at the sample surface. However, some parasitic growth occurred on the wafer edges for both samples. Cross-section microscopy found high dislocation density in these areas with and a majority of them are edge dislocations.
KW - A1-Characterization, Defects
KW - A3-Hydride Vapor Phase Epitaxy
KW - B1-Nitrides
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U2 - 10.1016/j.jcrysgro.2018.07.010
DO - 10.1016/j.jcrysgro.2018.07.010
M3 - Article
AN - SCOPUS:85049805079
SN - 0022-0248
VL - 498
SP - 346
EP - 351
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
ER -