The influences of the material properties on ceramic micro-stereolithography

Cheng Sun, Xiang Zhang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

77 Scopus citations

Abstract

Ceramic micro-stereolithography (μSL) was recently introduced in the fabrication of complex 3D ceramic microstructures. Light scattering is found as an important factor in the μSL of ceramics. In this work, the Monte Carlo ray tracing method is employed to investigate the influences of the important materials properties on the scattering during the ceramic μSL. It is found that the scattering is the strongest when the size of the ceramic powders approaches to the laser wavelength (0.364 μm). It was also found that the higher the refractive index contrast between the particle and the resin, the stronger the light scattering. High laser intensity is required to fabricate absorbing ceramic materials to compensate for the laser energy absorbed by the ceramic particle. The μSL of three typical ceramic powders: silica, alumina, and lead zirconate titanate (PZT) are examined by the numerical model. The numerical model has been demonstrated as an efficient tool to optimize the μSL process. Finally, the ceramic micro green structures have been successfully fabricated.

Original languageEnglish (US)
Pages (from-to)364-370
Number of pages7
JournalSensors and Actuators, A: Physical
Volume101
Issue number3
DOIs
StatePublished - Oct 30 2002

Keywords

  • Ceramic
  • Micro-stereolithography
  • Microfabrication
  • Monte Carlo simulation
  • Polymer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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