TY - GEN
T1 - The responsivity of a miniaturized passive implantable wireless pressure sensor
AU - Jiang, Hao
AU - Lan, Di
AU - Goldman, Ken
AU - Etemadi, Mozziyar
AU - Shahnasser, Hamid
AU - Roy, Shuvo
PY - 2011/3/31
Y1 - 2011/3/31
N2 - A miniature batteryless implantable wireless pressure sensor that can be used deep inside the body is desired by the medical community. MEMS technology makes it possible to achieve high responsivity that directly determines the operating distance between a miniature implanted sensor and the external RF probe, while providing the read-out. In this paper, for the first time, an analytical expression of the system responsivity versus the sensor design is derived using an equivalent circuit model. Also, the integration of micro-coil inductors and pressure sensitive capacitors on a single silicon chip using MEMS fabrication techniques is demonstrated. Further, the derived analytical design theory is validated by the measured responsivity of these sensors.
AB - A miniature batteryless implantable wireless pressure sensor that can be used deep inside the body is desired by the medical community. MEMS technology makes it possible to achieve high responsivity that directly determines the operating distance between a miniature implanted sensor and the external RF probe, while providing the read-out. In this paper, for the first time, an analytical expression of the system responsivity versus the sensor design is derived using an equivalent circuit model. Also, the integration of micro-coil inductors and pressure sensitive capacitors on a single silicon chip using MEMS fabrication techniques is demonstrated. Further, the derived analytical design theory is validated by the measured responsivity of these sensors.
UR - http://www.scopus.com/inward/record.url?scp=79953090920&partnerID=8YFLogxK
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U2 - 10.1109/BIOWIRELESS.2011.5724342
DO - 10.1109/BIOWIRELESS.2011.5724342
M3 - Conference contribution
C2 - 25309965
AN - SCOPUS:79953090920
SN - 9781424476855
T3 - 2011 IEEE Radio and Wireless Week, RWW 2011 - 2011 IEEE Topical Conference on Biomedical Wireless Technologies, Networks, and Sensing Systems, BioWireleSS 2011
SP - 11
EP - 14
BT - 2011 IEEE Radio and Wireless Week, RWW 2011 - 2011 IEEE Topical Conference on Biomedical Wireless Technologies, Networks, and Sensing Systems, BioWireleSS 2011
T2 - 2011 IEEE Topical Conference on Biomedical Wireless Technologies, Networks, and Sensing Systems, BioWireleSS 2011
Y2 - 16 January 2011 through 19 January 2011
ER -