The role of ion/surface interactions and photo-induced reactions during film growth from the vapor phase

J. E. Greene*, T. Motooka, J. E. Sundgren, D. Lubben, S. Gorbatkin, S. A. Barnett

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

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Chemistry

Physics

Material Science

Engineering

Medicine and Dentistry