| Original language | English |
|---|---|
| Title of host publication | Ion Beam Assisted Film Growth |
| Editors | T. Itoh |
| Place of Publication | Tokyo |
| Publisher | Elseveir |
| State | Published - 1988 |
The Role of Ion/Surface Interactions During Film Growth from the Vapor Phase
J.E. Greene, S.A. Barnett, J.E. Sundgren, A. Rockett
Research output: Chapter in Book/Report/Conference proceeding › Chapter