The strain gradient effect in microelectromechanical systems (MEMS)

Zhenyu Xue; M. Taher A Saif; Yonggang Huang

doi:10.1109/84.982860

The strain gradient effect in microelectromechanical systems (MEMS)

Zhenyu Xue^*, M. Taher A Saif, Yonggang Huang

^*Corresponding author for this work

Civil and Environmental Engineering

Research output: Contribution to journal › Article › peer-review

31 Scopus citations

Abstract

Metallic materials display strong size effect when the characteristic length of deformation is on the order of microns. The theory of mechanism-based strain gradient (MSG) plasticity established from the Taylor dislocation model has captured this size dependence of material behavior at the micron scale very well. The strain gradient effect in microelectromechanical systems (MEMS) is investigated in this paper via the MSG plasticity theory since the typical size of MEMS is on the order of microns (comparable to the internal material length in MSG plasticity). Through an example of a digital micromirror device (DMD), it is shown that the strain gradient effect significantly increases the mechanical strain energy in the DMD, and reduces the rotation time of the micromirror. However, the strain gradient has no effect on the critical bias voltage governing the fast rotation of the micromirror.

Original language	English (US)
Pages (from-to)	27-35
Number of pages	9
Journal	Journal of Microelectromechanical Systems
Volume	11
Issue number	1
DOIs	https://doi.org/10.1109/84.982860
State	Published - Feb 2002

Funding

Manuscript received May 23, 2001; revised September 6, 2001. The work of M. T. A. Saif was supported by an NSF Career Grant ECS 97-34368. The work of Y. Huang was supported by NSF Grant CMS-0084980 and NSFC. Subject Editor R. T. Howe. The authors are with the Department of Mechanical and Industrial Engineering, University of Illinois, Urbana, IL 61801 USA (e-mail: [email protected]). Publisher Item Identifier S 1057-7157(02)00079-3.

Keywords

Microelectromechanical systems (MEMS)
Size effect
Strain gradient plasticity

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/84.982860

Cite this

@article{ceaa04cb79c04d7a97d24ba66b723aa5,

title = "The strain gradient effect in microelectromechanical systems (MEMS)",

abstract = "Metallic materials display strong size effect when the characteristic length of deformation is on the order of microns. The theory of mechanism-based strain gradient (MSG) plasticity established from the Taylor dislocation model has captured this size dependence of material behavior at the micron scale very well. The strain gradient effect in microelectromechanical systems (MEMS) is investigated in this paper via the MSG plasticity theory since the typical size of MEMS is on the order of microns (comparable to the internal material length in MSG plasticity). Through an example of a digital micromirror device (DMD), it is shown that the strain gradient effect significantly increases the mechanical strain energy in the DMD, and reduces the rotation time of the micromirror. However, the strain gradient has no effect on the critical bias voltage governing the fast rotation of the micromirror.",

keywords = "Microelectromechanical systems (MEMS), Size effect, Strain gradient plasticity",

author = "Zhenyu Xue and Saif, {M. Taher A} and Yonggang Huang",

note = "Funding Information: Manuscript received May 23, 2001; revised September 6, 2001. The work of M. T. A. Saif was supported by an NSF Career Grant ECS 97-34368. The work of Y. Huang was supported by NSF Grant CMS-0084980 and NSFC. Subject Editor R. T. Howe. The authors are with the Department of Mechanical and Industrial Engineering, University of Illinois, Urbana, IL 61801 USA (e-mail: [email protected]). Publisher Item Identifier S 1057-7157(02)00079-3.",

year = "2002",

month = feb,

doi = "10.1109/84.982860",

language = "English (US)",

volume = "11",

pages = "27--35",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1",

}

TY - JOUR

T1 - The strain gradient effect in microelectromechanical systems (MEMS)

AU - Xue, Zhenyu

AU - Saif, M. Taher A

AU - Huang, Yonggang

N1 - Funding Information: Manuscript received May 23, 2001; revised September 6, 2001. The work of M. T. A. Saif was supported by an NSF Career Grant ECS 97-34368. The work of Y. Huang was supported by NSF Grant CMS-0084980 and NSFC. Subject Editor R. T. Howe. The authors are with the Department of Mechanical and Industrial Engineering, University of Illinois, Urbana, IL 61801 USA (e-mail: [email protected]). Publisher Item Identifier S 1057-7157(02)00079-3.

PY - 2002/2

Y1 - 2002/2

N2 - Metallic materials display strong size effect when the characteristic length of deformation is on the order of microns. The theory of mechanism-based strain gradient (MSG) plasticity established from the Taylor dislocation model has captured this size dependence of material behavior at the micron scale very well. The strain gradient effect in microelectromechanical systems (MEMS) is investigated in this paper via the MSG plasticity theory since the typical size of MEMS is on the order of microns (comparable to the internal material length in MSG plasticity). Through an example of a digital micromirror device (DMD), it is shown that the strain gradient effect significantly increases the mechanical strain energy in the DMD, and reduces the rotation time of the micromirror. However, the strain gradient has no effect on the critical bias voltage governing the fast rotation of the micromirror.

AB - Metallic materials display strong size effect when the characteristic length of deformation is on the order of microns. The theory of mechanism-based strain gradient (MSG) plasticity established from the Taylor dislocation model has captured this size dependence of material behavior at the micron scale very well. The strain gradient effect in microelectromechanical systems (MEMS) is investigated in this paper via the MSG plasticity theory since the typical size of MEMS is on the order of microns (comparable to the internal material length in MSG plasticity). Through an example of a digital micromirror device (DMD), it is shown that the strain gradient effect significantly increases the mechanical strain energy in the DMD, and reduces the rotation time of the micromirror. However, the strain gradient has no effect on the critical bias voltage governing the fast rotation of the micromirror.

KW - Microelectromechanical systems (MEMS)

KW - Size effect

KW - Strain gradient plasticity

UR - http://www.scopus.com/inward/record.url?scp=0036475534&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036475534&partnerID=8YFLogxK

U2 - 10.1109/84.982860

DO - 10.1109/84.982860

M3 - Article

AN - SCOPUS:0036475534

SN - 1057-7157

VL - 11

SP - 27

EP - 35

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 1

ER -

The strain gradient effect in microelectromechanical systems (MEMS)

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