The structure and properties of amorphous indium oxide

D. Bruce Buchholz; Qing Ma; Diego Alducin; Arturo Ponce; Miguel Jose-Yacaman; Rabi Khanal; Julia E. Medvedeva; Robert P.H. Chang

doi:10.1021/cm502689x

The structure and properties of amorphous indium oxide

D. Bruce Buchholz, Qing Ma, Diego Alducin, Arturo Ponce, Miguel Jose-Yacaman, Rabi Khanal, Julia E. Medvedeva, Robert P.H. Chang^*

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

189 Scopus citations

Abstract

A series of In₂O₃ thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-tocrystalline transition and the structure of amorphous In₂O₃ were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InO_x polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.

Original language	English (US)
Pages (from-to)	5401-5411
Number of pages	11
Journal	Chemistry of Materials
Volume	26
Issue number	18
DOIs	https://doi.org/10.1021/cm502689x
State	Published - Sep 23 2014

Funding

For this research, R.P.H.C., R.K., and J.E.M. were supported by the MRSEC program of the National Science Foundation at Northwestern University under grant no. DMR-1121262. D.B.B. was supported by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under the Award Number DE-FG02-06ER46320. This work made use of the J.B. Cohen X-ray Diffraction Facility supported by the MRSEC program of the National Science Foundation (DMR-1121262) at the Materials Research Center of Northwestern University; the Optical Microscopy and Metallography Facility MRSEC program of the National Science Foundation. X-ray absorption measurements were performed at the DuPont-Northwestern-Dow Collaborative Access Team (DND-CAT) located at Sector 5 of the Advanced Photon Source (APS). DND-CAT is supported by E.I. DuPont de Nemours & Co., The Dow Chemical Company, and Northwestern University. Use of the APS, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science by Argonne National Laboratory, was supported by the U.S. DOE under Contract No. DE-AC02-06CH11357. Computational resources were provided by the NSF-supported XSEDE program, grant TG-DMR080007. Electron microscopy was supported by the National Center for Research Resources (5 G12RR013646-12) and Department of Defense # 64756-RT-REP. D.A., A.P., and M.J.-Y. also thank NSF PREM Grant # DMR 0934218. For this research, R.P.H.C., R.K., and J.E.M. were supported by the MRSEC program of the National Science Foundation at Northwestern University under grant no. DMR-1121262. D.B.B. was supported by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under the Award Number DE-FG02-06ER46320. This work made use of the J.B. Cohen X-ray Diffraction Facility supported by the MRSEC program of the National Science Foundation (DMR-1121262) at the Materials Research Center of Northwestern University; the Optical Microscopy and Metallography Facility MRSEC program of the National Science Foundation. X-ray absorption measurements were performed at the DuPont− Northwestern−Dow Collaborative Access Team (DND-CAT) located at Sector 5 of the Advanced Photon Source (APS). DND-CAT is supported by E.I. DuPont de Nemours & Co., The Dow Chemical Company, and Northwestern University. Use of the APS, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science by Argonne National Laboratory, was supported by the U.S. DOE under Contract No. DE-AC02-06CH11357. Computational resources were provided by the NSF-supported XSEDE program, grant TG-DMR080007. Electron microscopy was supported by the National Center for Research Resources (5 G12RR013646-12) and Department of Defense #64756-RT-REP. D.A., A.P., and M.J.-Y. also thank NSF PREM Grant # DMR 0934218.

ASJC Scopus subject areas

General Chemistry
General Chemical Engineering
Materials Chemistry

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10.1021/cm502689x

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@article{f9df95c608144039851994b5da330bc1,

title = "The structure and properties of amorphous indium oxide",

abstract = "A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-tocrystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.",

author = "Buchholz, {D. Bruce} and Qing Ma and Diego Alducin and Arturo Ponce and Miguel Jose-Yacaman and Rabi Khanal and Medvedeva, {Julia E.} and Chang, {Robert P.H.}",

note = "Publisher Copyright: {\textcopyright} 2014 American Chemical Society.",

year = "2014",

month = sep,

day = "23",

doi = "10.1021/cm502689x",

language = "English (US)",

volume = "26",

pages = "5401--5411",

journal = "Chemistry of Materials",

issn = "0897-4756",

publisher = "American Chemical Society",

number = "18",

}

TY - JOUR

T1 - The structure and properties of amorphous indium oxide

AU - Buchholz, D. Bruce

AU - Ma, Qing

AU - Alducin, Diego

AU - Ponce, Arturo

AU - Jose-Yacaman, Miguel

AU - Khanal, Rabi

AU - Medvedeva, Julia E.

AU - Chang, Robert P.H.

PY - 2014/9/23

Y1 - 2014/9/23

N2 - A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-tocrystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.

AB - A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-tocrystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.

UR - http://www.scopus.com/inward/record.url?scp=84990842364&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84990842364&partnerID=8YFLogxK

U2 - 10.1021/cm502689x

DO - 10.1021/cm502689x

M3 - Article

C2 - 25678743

AN - SCOPUS:84990842364

SN - 0897-4756

VL - 26

SP - 5401

EP - 5411

JO - Chemistry of Materials

JF - Chemistry of Materials

IS - 18

ER -

The structure and properties of amorphous indium oxide

Abstract

Funding

ASJC Scopus subject areas

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