Theoretical and experimental study of impact of electric field on the atomic layer epitaxy of ZnO on α-Al2O3 surface

C. H. Liu; R. P.H. Chang

doi:10.1063/1.1469604

Theoretical and experimental study of impact of electric field on the atomic layer epitaxy of ZnO on α-Al₂O₃ surface

C. H. Liu^*, R. P.H. Chang

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

The impact of electric field on the atomic layer epitaxy of ZnO on α-Al₂O₃ surface was studied. The polarization orientation and the polarization forces were the two effects that influenced the epitaxial growth. Experimental results indicated that electric field could make growth difference for the ZnO films with this method.

Original language	English (US)
Pages (from-to)	8139-8143
Number of pages	5
Journal	Journal of Chemical Physics
Volume	116
Issue number	18
DOIs	https://doi.org/10.1063/1.1469604
State	Published - May 8 2002

ASJC Scopus subject areas

Physics and Astronomy(all)
Physical and Theoretical Chemistry

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@article{9dcfe89f821a424d8aa90c952a6731f3,

title = "Theoretical and experimental study of impact of electric field on the atomic layer epitaxy of ZnO on α-Al2O3 surface",

abstract = "The impact of electric field on the atomic layer epitaxy of ZnO on α-Al2O3 surface was studied. The polarization orientation and the polarization forces were the two effects that influenced the epitaxial growth. Experimental results indicated that electric field could make growth difference for the ZnO films with this method.",

author = "Liu, {C. H.} and Chang, {R. P.H.}",

year = "2002",

month = may,

day = "8",

doi = "10.1063/1.1469604",

language = "English (US)",

volume = "116",

pages = "8139--8143",

journal = "Journal of Chemical Physics",

issn = "0021-9606",

publisher = "American Institute of Physics Publising LLC",

number = "18",

}

TY - JOUR

T1 - Theoretical and experimental study of impact of electric field on the atomic layer epitaxy of ZnO on α-Al2O3 surface

AU - Liu, C. H.

AU - Chang, R. P.H.

PY - 2002/5/8

Y1 - 2002/5/8

N2 - The impact of electric field on the atomic layer epitaxy of ZnO on α-Al2O3 surface was studied. The polarization orientation and the polarization forces were the two effects that influenced the epitaxial growth. Experimental results indicated that electric field could make growth difference for the ZnO films with this method.

AB - The impact of electric field on the atomic layer epitaxy of ZnO on α-Al2O3 surface was studied. The polarization orientation and the polarization forces were the two effects that influenced the epitaxial growth. Experimental results indicated that electric field could make growth difference for the ZnO films with this method.

UR - http://www.scopus.com/inward/record.url?scp=0037042124&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037042124&partnerID=8YFLogxK

U2 - 10.1063/1.1469604

DO - 10.1063/1.1469604

M3 - Article

AN - SCOPUS:0037042124

SN - 0021-9606

VL - 116

SP - 8139

EP - 8143

JO - Journal of Chemical Physics

JF - Journal of Chemical Physics

IS - 18

ER -

Theoretical and experimental study of impact of electric field on the atomic layer epitaxy of ZnO on α-Al₂O₃ surface

Abstract

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